Epitaxy and doping of Si and Si1−xGex at low temperature by rapid thermal chemical vapor deposition

1993 ◽  
Vol 11 (3) ◽  
pp. 1134 ◽  
Author(s):  
D. Dutartre
Keyword(s):  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Thermal Chemical Vapor Deposition

Low-Temperature Growth of Carbon Nanofiber by Thermal Chemical Vapor Deposition Using CuNi Catalyst

2006 ◽  
Vol 45 (6A) ◽  
pp. 5329-5331 ◽  
Author(s):  
Katsunori Aoki ◽  
Tetsurou Yamamoto ◽  
Hiroshi Furuta ◽  
Takashi Ikuno ◽  
Shinichi Honda ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Carbon Nanofiber ◽  
Chemical Vapor ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Thermal Chemical Vapor Deposition

Growth of Carbon Nanotube by Thermal Chemical Vapor Deposition at Low Temperature with FeZrN Film

2003 ◽  
Vol 42 (Part 2, No. 10A) ◽  
pp. L1205-L1207
Author(s):  
Yasunori Kanazawa ◽  
Tetsuya Shiroishi ◽  
Takao Sawada ◽  
Akihiko Hosono ◽  
Shuhei Nakata ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Carbon Nanotube ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Thermal Chemical Vapor Deposition
Sign in / Sign up

Export Citation Format

Share Document