High-resolution reactive ion etching and damage effects in the Si/GexSi1−x system

1993 ◽  
Vol 11 (6) ◽  
pp. 2224 ◽  
Author(s):  
R. Cheung
Keyword(s):  
High Resolution ◽  
Reactive Ion Etching ◽  
Ion Etching

Use of deep reactive ion etching in the fabrication of high-efficiency high-resolution crystal x-ray analyzers

2002 ◽  
Author(s):  
Bor-Yuan Shew ◽  
Ruey-Shing Huang ◽  
Duan-Jen Wang ◽  
Shen-Yaw Perng ◽  
Chien-Kuang Kuan ◽  
...  
Keyword(s):  
High Resolution ◽  
High Efficiency ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Deep Reactive Ion Etching ◽  
X Ray

Lithographic micropatterning on the β‐PVDF film using reactive ion etching aim for high‐resolution skin sensors

2019 ◽  
Vol 14 (10) ◽  
pp. 1575-1577 ◽  
Author(s):  
Hirofumi Miki ◽  
Ryota Sugii ◽  
Yutoku Kawabata ◽  
Shigeki Tsuchitani
Keyword(s):  
High Resolution ◽  
Reactive Ion Etching ◽  
Pvdf Film ◽  
Ion Etching

Reactive-ion etching of tungsten for high-resolution x-ray masks

1994 ◽  
Author(s):  
Loretta M. Shirey ◽  
Kelly W. Foster ◽  
William P. Chu ◽  
John Kosakowski ◽  
Kee W. Rhee ◽  
...  
Keyword(s):  
High Resolution ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
X Ray

High resolution reactive ion etching of GaN and etch-induced effects

1999 ◽  
Vol 17 (6) ◽  
pp. 2759 ◽  
Author(s):  
R. Cheung ◽  
R. J. Reeves ◽  
B. Rong ◽  
S. A. Brown ◽  
E. J. M. Fakkeldij ◽  
...  
Keyword(s):  
High Resolution ◽  
Reactive Ion Etching ◽  
Ion Etching
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