Evaluation of polyencapsulation, oxygen leak, and low energy ion bombardment in the reduction of secondary ion mass spectrometry surface ion yield transients

S. F. Corcoran

doi:10.1116/1.586356

Evaluation of polyencapsulation, oxygen leak, and low energy ion bombardment in the reduction of secondary ion mass spectrometry surface ion yield transients

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.586356 ◽

1992 ◽

Vol 10 (1) ◽

pp. 342 ◽

Cited By ~ 11

Author(s):

S. F. Corcoran

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Ion Bombardment ◽

Low Energy ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Significant improvement in depth resolution of Cr/Ni interfaces by secondary ion mass spectrometry profiling under normal O2+ion bombardment

Applied Physics Letters ◽

10.1063/1.107397 ◽

1992 ◽

Vol 60 (10) ◽

pp. 1178-1180 ◽

Cited By ~ 23

Author(s):

Kyung Joong Kim ◽

Dae Won Moon

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Depth Resolution ◽

Ion Bombardment ◽

Ion Mass Spectrometry ◽

Secondary Ion

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The advantages of normal incidence ultra-low energy secondary ion mass spectrometry depth profiling

Applied Surface Science ◽

10.1016/s0169-4332(98)00812-5 ◽

1999 ◽

Vol 144-145 ◽

pp. 292-296 ◽

Cited By ~ 22

Author(s):

T.J Ormsby ◽

D.P Chu ◽

M.G Dowsett ◽

G.A Cooke ◽

S.B Patel

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Depth Profiling ◽

Normal Incidence ◽

Low Energy ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Hydrogen Ion Bombardment in Secondary Ion Mass Spectrometry

Springer Series in Chemical Physics - Secondary Ion Mass Spectrometry SIMS IV ◽

10.1007/978-3-642-82256-8_16 ◽

1984 ◽

pp. 57-59 ◽

Cited By ~ 1

Author(s):

V. T. Cherepin ◽

A. A. Kosyachkov ◽

I. N. Makeeva

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Ion Bombardment ◽

Hydrogen Ion ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Ultrastatic secondary ion mass spectrometry using very-low-energy reactive ions

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(91)95188-j ◽

1991 ◽

Vol 59-60 ◽

pp. 116-119

Author(s):

Tanaka Tohru ◽

Maruo Tetsuya ◽

Homma Yoshikazu ◽

Kurosawa Satoru

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Low Energy ◽

Ion Mass Spectrometry ◽

Secondary Ion ◽

Reactive Ions

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Is proton cationization promoted by polyatomic primary ion bombardment during time-of-flight secondary ion mass spectrometry analysis of frozen aqueous solutions?

Rapid Communications in Mass Spectrometry ◽

10.1002/rcm.2446 ◽

2006 ◽

Vol 20 (8) ◽

pp. 1327-1334 ◽

Cited By ~ 53

Author(s):

Xavier A. Conlan ◽

Nicholas P. Lockyer ◽

John C. Vickerman

Keyword(s):

Mass Spectrometry ◽

Aqueous Solutions ◽

Secondary Ion Mass Spectrometry ◽

Time Of Flight ◽

Ion Bombardment ◽

Mass Spectrometry Analysis ◽

Spectrometry Analysis ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Degradation of poly(acrylates) under SF5+ primary ion bombardment studied using time-of-flight secondary ion mass spectrometry. 1. Effect of main chain and pendant methyl groups

Surface and Interface Analysis ◽

10.1002/sia.2006 ◽

2005 ◽

Vol 37 (1) ◽

pp. 42-52 ◽

Cited By ~ 14

Author(s):

M. S. Wagner

Keyword(s):

Mass Spectrometry ◽

Main Chain ◽

Secondary Ion Mass Spectrometry ◽

Time Of Flight ◽

Ion Bombardment ◽

Methyl Groups ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Evaluation of sputtering induced surface roughness development of Ni/Cu multilayers thin films by Time-of-Flight Secondary Ion Mass Spectrometry depth profiling with different energies O2+ ion bombardment

Thin Solid Films ◽

10.1016/j.tsf.2018.10.049 ◽

2019 ◽

Vol 669 ◽

pp. 188-197

Author(s):

X.L. Yan ◽

M.M. Duvenhage ◽

J.Y. Wang ◽

H.C. Swart ◽

J.J. Terblans

Keyword(s):

Mass Spectrometry ◽

Thin Films ◽

Surface Roughness ◽

Secondary Ion Mass Spectrometry ◽

Time Of Flight ◽

Depth Profiling ◽

Ion Bombardment ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Degradation of poly(acrylates) under SF5+ primary ion bombardment studied using time-of-flight secondary ion mass spectrometry. 2. Poly(n-alkyl methacrylates)

Surface and Interface Analysis ◽

10.1002/sia.2007 ◽

2005 ◽

Vol 37 (1) ◽

pp. 53-61 ◽

Cited By ~ 9

Author(s):

M. S. Wagner

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Time Of Flight ◽

Ion Bombardment ◽

Ion Mass Spectrometry ◽

Secondary Ion ◽

Alkyl Methacrylates

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Two-dimensional profiling of large tilt angle, low energy boron implanted structure using secondary-ion mass spectrometry

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.588473 ◽

1996 ◽

Vol 14 (1) ◽

pp. 348 ◽

Cited By ~ 7

Author(s):

G. A. Cooke

Keyword(s):

Mass Spectrometry ◽

Tilt Angle ◽

Secondary Ion Mass Spectrometry ◽

Low Energy ◽

Two Dimensional ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Characterization of nitrogen distribution in HfO2 with low energy secondary ion mass spectrometry

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1914811 ◽

2005 ◽

Vol 23 (4) ◽

pp. 589-592 ◽

Cited By ~ 4

Author(s):

Z. X. Jiang ◽

K. Kim ◽

J. Lerma ◽

D. Sieloff ◽

T. Y. Luo ◽

...

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Low Energy ◽

Nitrogen Distribution ◽

Ion Mass Spectrometry ◽

Secondary Ion

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