Characterization of nitrogen distribution in HfO2 with low energy secondary ion mass spectrometry
2005 ◽
Vol 23
(4)
◽
pp. 589-592
◽
Keyword(s):
Keyword(s):
2002 ◽
Vol 33
(12)
◽
pp. 924-931
◽
1980 ◽
Vol 74
(1)
◽
pp. 150-162
◽
2009 ◽
Vol 60
(1)
◽
pp. 60-64
◽
1999 ◽
Vol 144-145
◽
pp. 292-296
◽