Secondary ion mass spectrometry depth profiling of nanometer-scale p+-n junctions fabricated by Ga+ focused ion beam implantation

1992 ◽  
Vol 10 (1) ◽  
pp. 333 ◽  
Author(s):  
Steven W. Novak
Keyword(s):  
Mass Spectrometry ◽  
Focused Ion Beam ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Beam ◽  
Depth Profiling ◽  
Nanometer Scale ◽  
Ion Beam Implantation ◽  
Ion Mass Spectrometry ◽  
Secondary Ion

scholarly journals Combined focused ion beam and secondary ion mass spectrometry for high resolution light element detection applied on Li-Ion batteries

2021 ◽  
Vol 27 (S1) ◽  
pp. 1012-1015
Author(s):  
Gudrun Wilhelm ◽  
Ute Golla-Schindler ◽  
Katharina Wöhrl ◽  
Christian Geisbauer ◽  
Graham Cooke ◽  
...  
Keyword(s):  
Mass Spectrometry ◽  
High Resolution ◽  
Focused Ion Beam ◽  
Secondary Ion Mass Spectrometry ◽  
Ion Beam ◽  
Light Element ◽  
Li Ion Batteries ◽  
Ion Mass Spectrometry ◽  
Li Ion ◽  
Secondary Ion
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