Simulation of the effect of thin film microstructure on current and temperature distributions in very large scale integrated metallization structures

1992 ◽  
Vol 10 (5) ◽  
pp. 2267 ◽  
Author(s):  
T. Smy
Keyword(s):  
Thin Film ◽  
Large Scale ◽  
Temperature Distributions ◽  
Film Microstructure

The Structure and Properties of MoSi2 Thin Film in Mos Process

1980 ◽  
Vol 38 ◽  
pp. 326-327
Author(s):  
C.K. Wu ◽  
P. Chang ◽  
N. Godinho
Keyword(s):  
Thin Film ◽  
Integrated Circuits ◽  
High Performance ◽  
Large Scale ◽  
Process Development ◽  
Structure And Properties ◽  
Metal Silicides ◽  
High Oxidation ◽  
Important Approach ◽  
High Oxidation Resistance

Recently, the use of refractory metal silicides as low resistivity, high temperature and high oxidation resistance gate materials in large scale integrated circuits (LSI) has become an important approach in advanced MOS process development (1). This research is a systematic study on the structure and properties of molybdenum silicide thin film and its applicability to high performance LSI fabrication.

scholarly journals Performance Improvement of ZnSnO Thin-Film Transistors with Low-Temperature Self-Combustion Reaction

Electronics ◽  
2021 ◽  
Vol 10 (9) ◽  
pp. 1099
Author(s):  
Ye-Ji Han ◽  
Se Hyeong Lee ◽  
So-Young Bak ◽  
Tae-Hee Han ◽  
Sangwoo Kim ◽  
...  
Keyword(s):  
Thin Film ◽  
Photoelectron Spectroscopy ◽  
Large Scale ◽  
Low Cost ◽  
Thermal Analyses ◽  
Thin Film Transistor ◽  
Sol Gel ◽  
Annealing Temperatures ◽  
Zinc Tin Oxide ◽  
Thermal Limitation

Conventional sol-gel solutions have received significant attention in thin-film transistor (TFT) manufacturing because of their advantages such as simple processing, large-scale applicability, and low cost. However, conventional sol-gel processed zinc tin oxide (ZTO) TFTs have a thermal limitation in that they require high annealing temperatures of more than 500 °C, which are incompatible with most flexible plastic substrates. In this study, to overcome the thermal limitation of conventional sol-gel processed ZTO TFTs, we demonstrated a ZTO TFT that was fabricated at low annealing temperatures of 350 °C using self-combustion. The optimized device exhibited satisfactory performance, with μsat of 4.72 cm2/V∙s, Vth of −1.28 V, SS of 0.86 V/decade, and ION/OFF of 1.70 × 106 at a low annealing temperature of 350 °C for one hour. To compare a conventional sol-gel processed ZTO TFT with the optimized device, thermogravimetric and differential thermal analyses (TG-DTA) and X-ray photoelectron spectroscopy (XPS) were implemented.

A compact new-concept ellipsometer for accurate large scale thin film measurements

2014 ◽  
Vol 16 (6) ◽  
pp. 065701 ◽  
Author(s):  
Richard Koops ◽  
Petro Sonin ◽  
Marijn van Veghel ◽  
Omar El Gawhary
Keyword(s):  
Thin Film ◽  
Large Scale

Effect of Film Microstructure on Domain Nucleation and Intrinsic Switching in Ferroelectric Y:HfO 2 Thin Film Capacitors

2021 ◽  
pp. 2108876
Author(s):  
Pratyush Buragohain ◽  
Adam Erickson ◽  
Takanori Mimura ◽  
Takao Shimizu ◽  
Hiroshi Funakubo ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Film Capacitors ◽  
Film Microstructure

Large scale alignment of a lamellar block copolymer thin film via electric fields: a time-resolved SFM study

Soft Matter ◽  
2006 ◽  
Vol 2 (12) ◽  
pp. 1089-1094 ◽  
Author(s):  
Violetta Olszowka ◽  
Markus Hund ◽  
Volker Kuntermann ◽  
Sabine Scherdel ◽  
Larisa Tsarkova ◽  
...  
Keyword(s):  
Thin Film ◽  
Block Copolymer ◽  
Electric Fields ◽  
Large Scale ◽  
Time Resolved ◽  
Large Scale Alignment

scholarly journals The oscillatory longwave Marangoni convection in a thin film heated from below

2021 ◽  
Vol 3 (10) ◽  
Author(s):  
Anna Samoilova ◽  
Alexander Nepomnyashchy
Keyword(s):  
Thin Film ◽  
Free Surface ◽  
Large Scale ◽  
Marangoni Convection ◽  
Thin Liquid Film ◽  
Stationary Regime ◽  
Oscillatory Regime ◽  
Oscillatory Flows ◽  
The Past ◽  
Heating From Below

Abstract A novel type of Marangoni convection was predicted theoretically a decade ago. The thin liquid film atop a substrate of low thermal conductivity was considered. In the case of heating from below, the Marangoni convection emerges not only in a conventional stationary regime, but also as oscillatory flows. Specifically, the oscillatory Marangoni convection emerges if (1) the heat flux from the free surface is small, and (2) the large-scale deformation of the free surface is allowed. During the past decade, this novel Marangoni convection was detected and investigated in several other theoretical works. The review discusses the recent achievements in studying the oscillatory Marangoni convection in a thin film heated from below. The guiding data for observation of the oscillatory regime are also provided.

Flexible Non-Intrusive Heat Flux Instrumentation for the AFRL Research Turbine

2011 ◽  
Author(s):  
Richard J. Anthony ◽  
John P. Clark ◽  
Stephen W. Kennedy ◽  
John M. Finnegan ◽  
Dean Johnson ◽  
...  
Keyword(s):  
Thin Film ◽  
Heat Flux ◽  
Large Scale ◽  
Thermal Loading ◽  
Pressure Sensors ◽  
Large Data ◽  
Fast Response ◽  
Data Sets ◽  
Unsteady Aerodynamic ◽  
Analysis System

This paper describes a large scale heat flux instrumentation effort for the AFRL HIT Research Turbine. The work provides a unique amount of high frequency instrumentation to acquire fast response unsteady heat flux in a fully rotational, cooled turbine rig along with unsteady pressure data to investigate thermal loading and unsteady aerodynamic airfoil interactions. Over 1200 dynamic sensors are installed on the 1 & 1/2 stage turbine rig. Airfoils include 658 double-sided thin film gauges for heat flux, 289 fast-response Kulite pressure sensors for unsteady aerodynamic measurements, and over 40 thermocouples. An overview of the instrumentation is given with in-depth focus on the non-commercial thin film heat transfer sensors designed and produced in the Heat Flux Instrumentation Laboratory at WPAFB. The paper further describes the necessary upgrade of data acquisition systems and signal conditioning electronics to handle the increased channel requirements of the HIT Research Turbine. More modern, reliable, and efficient data processing and analysis code provides better handling of large data sets and allows easy integration with the turbine design and analysis system under development at AFRL. Example data from cooled transient blowdown tests in the TRF are included along with measurement uncertainty.

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