Electrical degradation of Al/TiW/CoSi2 shallow junctions
1991 ◽
Vol 9
(1)
◽
pp. 69
◽
Keyword(s):
2011 ◽
Vol 131
(3)
◽
pp. 219-224
2010 ◽
Vol 130
(4)
◽
pp. 394-402
◽
1998 ◽
Keyword(s):