In situ stress monitoring and deposition of zero-stress W for x-ray masks
1991 ◽
Vol 9
(6)
◽
pp. 3297
◽
2002 ◽
Vol 4
(8)
◽
pp. 550-554
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2011 ◽
Vol 46
(7)
◽
pp. 593-606
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2014 ◽
Vol 88
(5)
◽
pp. 1592-1602
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Keyword(s):
2008 ◽
Vol 584-586
◽
pp. 263-268
◽
Keyword(s):
Keyword(s):
2013 ◽
Vol 446-447
◽
pp. 1113-1117
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Keyword(s):