Generation of low-energy neutral beams and radiation damage of SiO2/Si by neutral bombardment

Author(s):  
Tatsumi Mizutani
1983 ◽  
Vol 206 (1-2) ◽  
pp. 107-117 ◽  
Author(s):  
Masaaki Kobayashi ◽  
Kenjiro Kondo ◽  
Hiromi Hirabayashi ◽  
Shin-ichi Kurokawa ◽  
Mitsuhiko Taino ◽  
...  

2001 ◽  
Vol 84 (3) ◽  
pp. 200-204 ◽  
Author(s):  
Jizhong Zhang ◽  
Xiaoyan Ye ◽  
Xiaojun Yu ◽  
Hengde Li
Keyword(s):  

Author(s):  
George Rybicki ◽  
Irv Weinberg ◽  
Dave Scheiman ◽  
Carlos Vargas-Aburto ◽  
Roberto Uribe

2003 ◽  
Author(s):  
Emi Miyata ◽  
Hirohiko Kouno ◽  
Tomoyuki Kamazuka ◽  
Mitsunori Fukuda ◽  
Mototsugu Mihara ◽  
...  
Keyword(s):  

2004 ◽  
Vol 84 (9) ◽  
pp. 1555-1557 ◽  
Author(s):  
Tomohiro Kubota ◽  
Tomohiro Baba ◽  
Seiji Samukawa ◽  
Hiroyuki Kawashima ◽  
Yukiharu Uraoka ◽  
...  

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