Generation of low-energy neutral beams and radiation damage of SiO2/Si by neutral bombardment
1989 ◽
Vol 7
(3)
◽
pp. 547
◽
1983 ◽
Vol 206
(1-2)
◽
pp. 107-117
◽
1997 ◽
Vol 127-128
◽
pp. 897-900
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2001 ◽
Vol 84
(3)
◽
pp. 200-204
◽
1996 ◽
Vol 4
(2)
◽
pp. 101-110
◽
2003 ◽