Evaluation of polycrystalline silicon membranes on fused silica for x-ray lithography masks

1989 ◽  
Vol 7 (6) ◽  
pp. 1675 ◽  
Author(s):  
L. E. Trimble
Keyword(s):  
Polycrystalline Silicon ◽  
Fused Silica ◽  
X Ray ◽  
Silicon Membranes

Oxidation of silicon carbide and the formation of silica polymorphs

2006 ◽  
Vol 21 (10) ◽  
pp. 2550-2563 ◽  
Author(s):  
Maxime J-F. Guinel ◽  
M. Grant Norton
Keyword(s):  
Silicon Carbide ◽  
Photoelectron Spectroscopy ◽  
Polycrystalline Silicon ◽  
Ambient Pressure ◽  
Silicon Oxycarbide ◽  
Oxide Scales ◽  
X Ray ◽  
Transmission Electron ◽  
Polycrystalline Silicon Carbide ◽  
Crystalline Films

The oxidation of both single crystal and relatively pure polycrystalline silicon carbide, between 973 and 2053 K, resulted in the formation of cristobalite, quartz, or tridymite, which are the stable crystalline polymorphs of silica (SiO2) at ambient pressure. The oxide scales were found to be pure SiO2 with no contamination resulting from the oxidizing environment. The only variable affecting the occurrence of a specific polymorph was the oxidation temperature. Cristobalite was formed at temperatures ≥1673 K, tridymite between 1073 and 1573 K, and quartz formed at 973 K. The polymorphs were determined using electron diffraction in a transmission electron microscope. These results were further confirmed using infrared and Raman spectroscopies. Cristobalite was observed to grow in a spherulitic fashion from amorphous silica. This was not the case for tridymite and quartz, which appeared to grow as oriented crystalline films. The presence of a thin silicon oxycarbide interlayer was detected at the interface between the SiC substrate and the crystalline silica using x-ray photoelectron spectroscopy.

Composition and Structure of Spark Eroded Porous Silicon

1992 ◽  
Vol 283 ◽  
Author(s):  
R. E. Hummel ◽  
S.-S. Chang ◽  
M. Ludwig ◽  
A. Morrone
Keyword(s):  
Porous Silicon ◽  
Polycrystalline Silicon ◽  
Amorphous Matrix ◽  
Vibrational Modes ◽  
Photoluminescence Spectra ◽  
X Ray ◽  
Composition And Structure ◽  
Bending Mode ◽  
Spark Erosion ◽  
Silicon Particles

ABSTRACTPorous silicon which has been prepared by a “dry” technique, that is, by spark erosion, yields similar photoluminescence spectra as anodically etched porous silicon which has been prepared in aqueous solutions. Fourier transform infrared spectra reveal that the dominant features in spark eroded silicon are the Si-O-Si stretching mode and the Si-O-Si bending mode. No infrared vibrational modes characteristic for siloxene have been found in spark eroded Si. Results from X-ray and electron diffraction studies suggest that spark eroded Si involves minute polycrystalline silicon particles which are imbedded in an amorphous matrix.

Investigations of laser-induced damages in fused silica optics using x-ray laser interferometric microscopy

2010 ◽  
Vol 107 (10) ◽  
pp. 103103 ◽  
Author(s):  
D. Margarone ◽  
B. Rus ◽  
M. Kozlová ◽  
J. Nejdl ◽  
T. Mocek ◽  
...  
Keyword(s):  
Fused Silica ◽  
X Ray ◽  
Laser Interferometric

X-ray scattering by the fused silica surface etched by low-energy Ar ions

2019 ◽  
Vol 27 (5) ◽  
pp. 857-870 ◽  
Author(s):  
M.M. Barysheva ◽  
N.I. Chkhalo ◽  
M.N. Drozdov ◽  
M.S. Mikhailenko ◽  
A.E. Pestov ◽  
...  
Keyword(s):  
Silica Surface ◽  
Fused Silica ◽  
Low Energy ◽  
X Ray ◽  
X Ray Scattering ◽  
Ray Scattering

HYDROTHERMAL SYNTHESIS OF CALCIUM HYDROSILICATES

1934 ◽  
Vol 11 (4) ◽  
pp. 520-529 ◽  
Author(s):  
V. A. Vigfusson ◽  
G. N. Bates ◽  
T. Thorvaldson
Keyword(s):  
Hydrothermal Synthesis ◽  
Silica Gel ◽  
Fused Silica ◽  
Steam Treatment ◽  
Crystalline Substance ◽  
Water Mixture ◽  
Glycerol Water ◽  
X Ray ◽  
Lime Water ◽  
Calcium Hydrosilicate

A crystalline substance which appears in steam-cured Portland cement mortar has been shown to be a calcium hydrosilicate and has been prepared by hydrothermal synthesis from mixtures of silica sand with lime, dicalcium silicate and tricalcium silicate, silica gel and lime (after preliminary steam treatment and ignition) and by the action of saturated lime water on quartz crystals or fused silica plates. The crystals appear not to be acted on by solutions of sodium sulphate, calcium sulphate or alkali hydroxides, but they are slowly decomposed by solutions of magnesium sulphate and alkali carbonates and rapidly by dilute acids and ammonium salts. The crystals were obtained free from amorphous matter by growing them on quartz or silica plates in saturated lime water. When the compound was prepared in this way, the lime-silica-water ratio was found to be 2:1:1, the formula being therefore 2CaO∙SiO2∙H2O or H2Ca2SiO5. This product usually appears as thin lath-like prisms showing parallel extinction, positive elongation and moderate birefringence. The crystals are optically positive with a fairly large optic angle. 2V = 68°. The indices of refraction are αNa = 1.614 ±.002, βNa = 1.620 ±.002, γNa = 1.633 ±.002. The optical plane is parallel to the macropinacoid (100) and the acute bisectrix Z is parallel to the direction of elongation which is taken as the crystallographic axis C. The optical properties and X-ray pattern are distinctive and entirely different from those of hillebrandite or foshagite, which have the same composition.Another crystalline calcium hydrosilicate was obtained by hydrothermal synthesis from excess lime and silica gel. This appeared as very small needle-like prisms, observable only when magnified about 200 times. The crystals show parallel extinction, positive elongation and very low birefringence with an index of refraction of 1.597 ±.003. Analysis of this product, extracted with a glycerol-water mixture to remove excess lime, gave a lime-silica ratio of 2 to 1 with an uncertain amount of water of at least one mole. The X-ray pattern is distinctive and shows only slight similarity to the hillebrandite pattern.

scholarly journals Fabrication of Large-Grain Thick Polycrystalline Silicon Thin Films via Aluminum-Induced Crystallization for Application in Solar Cells

2013 ◽  
Vol 2013 ◽  
pp. 1-4
Author(s):  
Hsiao-Yeh Chu ◽  
Min-Hang Weng ◽  
Chen Lin
Keyword(s):  
Solar Cells ◽  
Polycrystalline Silicon ◽  
X Ray Diffraction ◽  
X Ray ◽  
Second Stage ◽  
Silicon Thin Films ◽  
Si Films ◽  
Two Stages ◽  
Induced Crystallization ◽  
Aluminum Induced Crystallization

The fabrication of large-grain 1.25 μm thick polycrystalline silicon (poly-Si) films via two-stage aluminum-induced crystallization (AIC) for application in thin-film solar cells is reported. The induced 250 nm thick poly-Si film in the first stage is used as the seed layer for the crystallization of a 1 μm thick amorphous silicon (a-Si) film in the second stage. The annealing temperatures in the two stages are both 500°C. The effect of annealing time (15, 30, 60, and 120 minutes) in the second stage on the crystallization of a-Si film is investigated using X-ray diffraction (XRD), scanning electron microscopy, and Raman spectroscopy. XRD and Raman results confirm that the induced poly-Si films are induced by the proposed process.

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