Molybdenum etching with chlorine atoms and molecular chlorine plasmas

1988 ◽  
Vol 6 (5) ◽  
pp. 1577 ◽  
Author(s):  
D. S. Fischl
Keyword(s):  
Molecular Chlorine ◽  
Chlorine Atoms

scholarly journals Oriented chlorine atoms as a probe of the nonadiabatic photodissociation dynamics of molecular chlorine

2000 ◽  
Vol 113 (20) ◽  
pp. 9022-9031 ◽  
Author(s):  
Andrew J. Alexander ◽  
Zee Hwan Kim ◽  
S. Alex Kandel ◽  
Richard N. Zare ◽  
T. Peter Rakitzis ◽  
...  
Keyword(s):  
Molecular Chlorine ◽  
Chlorine Atoms

scholarly journals Photoionisation Cross Sections of Chlorine Atoms and Molecules at 584 Å

1986 ◽  
Vol 39 (5) ◽  
pp. 779 ◽  
Author(s):  
WJ van der Meer ◽  
RJ Butselaar ◽  
CA de Lange
Keyword(s):  
Cross Section ◽  
Cross Sections ◽  
Ground State ◽  
Modulation Method ◽  
Absolute Cross Section ◽  
Molecular Chlorine ◽  
Chlorine Atoms ◽  
Atoms And Molecules ◽  
Ionic States ◽  
State Ionic

A recently developed modulation method is used to obtain cross sections for the photoionisation of ground state neutral to ground state ionic, atomic and molecular chlorine relative to that of the HCl + (X2n 1IZ,3IZ) +-- HCl(XI ~ +) transition at the He Ia wavelength. With the known absolute cross section of the latter process, determined by (e,2e) coincidence spectroscopy, the present ell,periments provide absolute photoionisation cross sections of the CI + epz,l,o) +-- Clep) and Cli (XZ n g, 1IZ,3 IZ) +-- Clz (X I ~ t) transitions. Relative cross sections, previously determined for the transitions to the additional Cl and Clz ionic states accessible with He Ia radiation, are used to obtain absolute cross sections for the Cl+(IDz, ISO) +-- Clep) and Cli(AZnu,1IZ,3IZ, BZ~t) +-- Clz(XI~t) ionisation processes.

Ion‐assisted etching of silicon by molecular chlorine

1984 ◽  
Vol 2 (2) ◽  
pp. 487-491 ◽  
Author(s):  
F. H. M. Sanders ◽  
A. W. Kolfschoten ◽  
J. Dieleman ◽  
R. A. Haring ◽  
A. Haring ◽  
...  
Keyword(s):  
Molecular Chlorine

Kinetics of the reactions of fluorine and chlorine atoms with ethylene oxide (oxirane)

2002 ◽  
Vol 34 (2) ◽  
pp. 122-125 ◽  
Author(s):  
D. Ponomarev ◽  
M. D. Hurley ◽  
T. J. Wallington
Keyword(s):  
Ethylene Oxide ◽  
Chlorine Atoms ◽  
Kinetics Of

scholarly journals Kristallstrukturen zweier Kupfer(II)-Cyclam-Komplexe: [{CuCl(C10N4H24)}2][CdCl4] und [Cu(C10N4H24)][CdCl3(H2O)2]Cl / Crystal Structures of Two Copper(II) Cyclam Complexes: [{CuCl(C10N4H24 )}2][CdCl4] and [Cu(C10N4H24)][CdCl3 (H2O)2]Cl

1995 ◽  
Vol 50 (5) ◽  
pp. 828-832 ◽  
Author(s):  
Joachim Pickardt ◽  
Isabella Hoffmeister
Keyword(s):  
Crystal Structures ◽  
Copper Atom ◽  
Water Molecules ◽  
Cadmium Atom ◽  
Bridging Ligands ◽  
Chlorine Atoms ◽  
Space Group ◽  
Distorted Octahedra ◽  
Cyclam Complexes

Abstract Crystals of both complexes were obtained by evaporation of the ethanol solvent. The crystals of [{CuCl(C10N4H24)}2][CdCl4] are tetragonal, space group I4̄2d, Z = 4, a = b = 1784.1(11), c = 1101.1(8) pm. Each copper atom is bonded to one cyclam ligand and two chlorine atoms which are acting as bridging ligands and connect the copper atoms to chains of distorted octahedra. Distorted tetrahedra of CdCl4 are situated in cavities between these chains. The crystals of [Cu(C10N4H24)][CdCl3(H2O)2]Cl are monoclinic (b), space group C2/c, Z = 4, a = 1581.9(8), b = 1323.3(7), c = 924.0(5) pm, β = 94.31(5)°. Cadmium is coordinated to four chlorine atoms and two water molecules, while all of the chlorine atoms act as bridging ligands connecting every cadmium atom to two adjacent cadmium atoms and to two copper atoms which lie in plane with the N atoms.

Infrared Spectra of Some Chloro Derivatives of s-Triazine

1966 ◽  
Vol 20 (3) ◽  
pp. 159-160 ◽  
Author(s):  
T. S. Herman
Keyword(s):  
Infrared Spectra ◽  
Triazine Ring ◽  
Chlorine Atoms ◽  
Vibrational Assignments ◽  
Fundamental Frequencies ◽  
Bending Mode ◽  
Chloro Derivatives ◽  
Derivatives Of

The effects of chlorine atoms on the fundamental frequencies of the s-triazine ring are discussed and the vibrational assignments in the region 1600–700 cm−1 are extended. The variation in the position of the C3N3-ring bending mode in the region near 810 cm−1 is discussed.

scholarly journals An investigation into the existence of zero-point energy in the Rock-Salt Lattice by an X-Ray Diffraction Method

1928 ◽  
Vol 118 (779) ◽  
pp. 334-350 ◽  
Keyword(s):  
Rock Salt ◽  
Diffraction Method ◽  
Zero Point ◽  
Temperature Factor ◽  
X Rays ◽  
Zero Point Energy ◽  
Chlorine Atoms ◽  
Point Energy ◽  
X Ray ◽  
State Of Rest

In the present paper we shall attempt to collate the results of four separate lines of research which, taken together, appear to provide some interesting checks between theory and experiment. The investigations to be considered are (1) the discussion by Waller* and by Wentzel,† on the basis of the quantum (wave) mechanics, of the scattering of radiation by an atom ; (2) the calculation by Hartree of the Schrödinger distribution of charge in the atoms of chlorine and sodium ; (3) the measurements of James and Miss Firth‡ of the scattering power of the sodium and chlorine atoms in the rock-salt crystal for X-rays at a series of temperatures extending as low as the temperature of liquid air ; and (4) the theoretical discussion of the temperature factor of X-ray reflexion by Debye§ and by Waller.∥ Application of the laws of scattering to the distribution of charge calculated for the sodium and chlorine atoms, enables us to calculate the coherent atomic scattering for X-radiation, as a function of the angle of scattering and of the wave-length, for these atoms in a state of rest, assuming that the frequency of the X-radiation is higher than, and not too near the frequency of the K - absorption edge for the atom.¶ From the observed scattering power at the temperature of liquid air, and from the measured value of the temperature factor, we can, by applying the theory of the temperature effect, calculate the scattering power at the absolute zero, or rather for the atom reduced to a state of rest. The extrapolation to a state of rest will differ according to whether we assume the existence or absence of zero point energy in the crystal lattice. Hence we may hope, in the first place to test the agreement between the observed scattering power and that calculated from the atomic model, and in the second place to see whether the experimental results indicate the presence of zero-point energy or no.

Incorporation of oxygen and chlorine atoms into low‐temperature (850 °C) silicon epitaxial films by chemical vapor deposition

1995 ◽  
Vol 66 (21) ◽  
pp. 2867-2869 ◽  
Author(s):  
Akihiro Miyauchi ◽  
Kazuhiro Ueda ◽  
Yousuke Inoue ◽  
Takaya Suzuki ◽  
Yoshinori Imai
Keyword(s):  
Chemical Vapor Deposition ◽  
Low Temperature ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Epitaxial Films ◽  
Chlorine Atoms
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