Nanowriter: A new high-voltage electron beam lithography system for nanometer-scale fabrication

1988 ◽  
Vol 6 (6) ◽  
pp. 2009 ◽  
Author(s):  
Z. W. Chen
Keyword(s):  
Electron Beam ◽  
High Voltage ◽  
Electron Beam Lithography ◽  
Nanometer Scale ◽  
Voltage Electron ◽  
High Voltage Electron ◽  
Lithography System

Lower submicron pattern definition by high-voltage electron-beam lithography

1982 ◽  
Vol 18 (20) ◽  
pp. 880 ◽  
Author(s):  
M. Yoshimi ◽  
K. Kawabuchi ◽  
T. Takigawa ◽  
M. Takahashi ◽  
Y. Kato
Keyword(s):  
Electron Beam ◽  
High Voltage ◽  
Electron Beam Lithography ◽  
Voltage Electron ◽  
High Voltage Electron

Proximity effect in high voltage electron beam lithography on Ti/Pt/Au metallization

1992 ◽  
Vol 17 (1-4) ◽  
pp. 29-32 ◽  
Author(s):  
M.N. Webster ◽  
A.H. Verbruggen ◽  
J. Romijn ◽  
H.F.F. Jos ◽  
P.M.A. Moors ◽  
...  
Keyword(s):  
Electron Beam ◽  
High Voltage ◽  
Proximity Effect ◽  
Electron Beam Lithography ◽  
Voltage Electron ◽  
High Voltage Electron

IIIB-5 high voltage electron beam lithography for VLSI fabrication

1982 ◽  
Vol 29 (10) ◽  
pp. 1678-1679
Author(s):  
M. Yoshimi ◽  
M. Takahashi ◽  
K. Kawabuchi ◽  
Y. Ka ◽  
T. Takigawa
Keyword(s):  
Electron Beam ◽  
High Voltage ◽  
Electron Beam Lithography ◽  
Voltage Electron ◽  
High Voltage Electron
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