Computer-controlled electron-beam writing system for thin film micro-optics
1987 ◽
Vol 5
(1)
◽
pp. 33
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2015 ◽
Vol 135
(9)
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pp. 1049-1054
Keyword(s):
1989 ◽
Vol 136
(9)
◽
pp. 2736-2740
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Keyword(s):
Keyword(s):
1994 ◽
Vol 12
(4)
◽
pp. 1628-1630
◽
Keyword(s):
2007 ◽
2019 ◽
Vol 34
(2)
◽
pp. 025015
◽
Keyword(s):