Application of the self-aligned titanium silicide process to very large-scale integrated n-metal-oxide-semiconductor and complementary metal-oxide-semiconductor technologies
1985 ◽
Vol 3
(6)
◽
pp. 1657
◽
1986 ◽
Vol 4
(3)
◽
pp. 905-911
◽
1994 ◽
Vol 33
(Part 1, No. 1B)
◽
pp. 480-485
◽
2010 ◽
Vol 28
(1)
◽
pp. C1G7-C1G11