Nanoscratch characterization of dual-ion-beam deposited C-doped boron nitride films

K. F. Chan; C. W. Ong; C. L. Choy

doi:10.1116/1.582064

Nanoscratch characterization of dual-ion-beam deposited C-doped boron nitride films

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.582064 ◽

1999 ◽

Vol 17 (6) ◽

pp. 3351-3357 ◽

Cited By ~ 3

Author(s):

K. F. Chan ◽

C. W. Ong ◽

C. L. Choy

Keyword(s):

Boron Nitride ◽

Ion Beam ◽

Boron Nitride Films

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Characterization of ion-beam-synthesized boron nitride films

Materials Science and Engineering ◽

10.1016/0025-5416(87)90209-6 ◽

1987 ◽

Vol 90 ◽

pp. 173-176 ◽

Cited By ~ 8

Author(s):

Amarjit Singh ◽

Roger A. Lessard ◽

Emile J. Knystautas

Keyword(s):

Boron Nitride ◽

Ion Beam ◽

Boron Nitride Films

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Characterization of cubic boron nitride films grown by mass separated ion beam deposition

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/0168-583x(95)00695-8 ◽

1995 ◽

Vol 106 (1-4) ◽

pp. 153-158 ◽

Cited By ~ 37

Author(s):

H. Hofsäss ◽

C. Ronning ◽

U. Griesmeier ◽

M. Gross ◽

S. Reinke ◽

...

Keyword(s):

Boron Nitride ◽

Ion Beam ◽

Cubic Boron Nitride ◽

Ion Beam Deposition ◽

Boron Nitride Films ◽

Beam Deposition

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Characterization of cubic boron nitride films prepared by ion beam assisted deposition

Surface and Coatings Technology ◽

10.1016/0257-8972(95)08354-5 ◽

1995 ◽

Vol 74-75 ◽

pp. 729-733 ◽

Cited By ~ 17

Author(s):

H. Wituschek ◽

H. Stopka-Ebler ◽

G.K. Wolf

Keyword(s):

Boron Nitride ◽

Ion Beam ◽

Cubic Boron Nitride ◽

Ion Beam Assisted Deposition ◽

Boron Nitride Films

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Characterization of cubic boron nitride films grown by mass separated ion beam deposition

Ion Beam Modification of Materials ◽

10.1016/b978-0-444-82334-2.50033-2 ◽

1996 ◽

pp. 153-158

Author(s):

H. Hofsäss ◽

C. Ronning ◽

U. Griesmeier ◽

M. Gross ◽

S. Reinke ◽

...

Keyword(s):

Boron Nitride ◽

Ion Beam ◽

Cubic Boron Nitride ◽

Ion Beam Deposition ◽

Boron Nitride Films ◽

Beam Deposition

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Characterization of boron nitride films prepared by the dual ion beam deposition technique

Materials Science and Engineering B ◽

10.1016/0921-5107(90)90014-3 ◽

1990 ◽

Vol 7 (1-2) ◽

pp. 107-110 ◽

Cited By ~ 19

Author(s):

W.L. Lin ◽

Z. Xia ◽

Y.L. Liu ◽

Y.C. Fen

Keyword(s):

Boron Nitride ◽

Ion Beam ◽

Deposition Technique ◽

Ion Beam Deposition ◽

Boron Nitride Films ◽

Beam Deposition

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Production and characterization of boron nitride films obtained by R.F. magnetron sputtering and reactive ion-beam-assisted deposition

Surface and Coatings Technology ◽

10.1016/0257-8972(88)90150-8 ◽

1988 ◽

Vol 36 (1-2) ◽

pp. 199-206 ◽

Cited By ~ 6

Author(s):

M. Elena ◽

L. Guzman ◽

S. Gialanella

Keyword(s):

Boron Nitride ◽

Magnetron Sputtering ◽

Ion Beam ◽

Ion Beam Assisted Deposition ◽

Boron Nitride Films

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Optical absorption and transport mechanisms of dual ion-beam-deposited boron-rich boron nitride films

Thin Solid Films ◽

10.1016/s0040-6090(01)00763-5 ◽

2001 ◽

Vol 388 (1-2) ◽

pp. 217-225 ◽

Cited By ~ 7

Author(s):

C.W Ong ◽

K.F Chan ◽

C.L Choy

Keyword(s):

Boron Nitride ◽

Optical Absorption ◽

Ion Beam ◽

Transport Mechanisms ◽

Boron Nitride Films

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In situ stress analysis of boron nitride films prepared by ion beam assisted deposition

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/s0168-583x(98)00045-7 ◽

1998 ◽

Vol 139 (1-4) ◽

pp. 327-331 ◽

Cited By ~ 15

Author(s):

M Zeitler ◽

S Sienz ◽

H Neumann ◽

M Zeuner ◽

J.W Gerlach ◽

...

Keyword(s):

Boron Nitride ◽

Stress Analysis ◽

Ion Beam ◽

In Situ Stress ◽

Ion Beam Assisted Deposition ◽

Boron Nitride Films ◽

In Situ Stress Analysis

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Tribological Characterization of Boron Nitride Films against Pure-titanium for Microforming die Application

Procedia Engineering ◽

10.1016/j.proeng.2014.10.255 ◽

2014 ◽

Vol 81 ◽

pp. 1909-1914 ◽

Cited By ~ 1

Author(s):

Yong Jin ◽

Shigeo Yasuhara ◽

Tetsuhide Shimizu ◽

Ming Yang

Keyword(s):

Boron Nitride ◽

Pure Titanium ◽

Tribological Characterization ◽

Boron Nitride Films

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A comparative study of composition, structure and elastic properties of boron nitride films deposited by magnetron and ion beam sputtering

Diamond and Related Materials ◽

10.1016/s0925-9635(98)00434-8 ◽

1999 ◽

Vol 8 (2-5) ◽

pp. 410-414 ◽

Cited By ~ 2

Author(s):

S Logothetidis ◽

C Charitidis ◽

P Patsalas ◽

Th Kehagias

Keyword(s):

Boron Nitride ◽

Comparative Study ◽

Elastic Properties ◽

Ion Beam ◽

Ion Beam Sputtering ◽

Beam Sputtering ◽

Composition Structure ◽

Boron Nitride Films

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