Target compound layer formation during reactive sputtering
1999 ◽
Vol 17
(4)
◽
pp. 1827-1831
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1992 ◽
Vol 102-104
◽
pp. 223-228
◽
2008 ◽
Vol 63
(3)
◽
pp. 139-146
◽
2012 ◽
Vol 248
◽
pp. 60-65
2019 ◽
Vol 785
◽
pp. 512-522
◽
Keyword(s):
1999 ◽
Vol 40
(7)
◽
pp. 815-820
◽
Keyword(s):
1994 ◽
Vol 23
(7)
◽
pp. 583-594
◽
Keyword(s):
1958 ◽