Comparison of electron property measurements in an inductively coupled plasma made by Langmuir probe and laser Thomson scattering techniques
1999 ◽
Vol 17
(2)
◽
pp. 493-499
◽
Keyword(s):
1987 ◽
Vol 2
(1)
◽
pp. 13
◽
2008 ◽
Vol 18
(1)
◽
pp. 014010
◽
Keyword(s):
1997 ◽
Vol 12
(7)
◽
pp. 697-701
◽
2012 ◽
Vol 7
(01)
◽
pp. C01049-C01049
◽
1985 ◽
Vol 40
(9)
◽
pp. 1211-1217
◽
1994 ◽
Vol 49
(12-14)
◽
pp. 1283-1303
◽
Langmuir probe measurements in a low pressure inductively coupled plasma used for diamond deposition
1999 ◽
Vol 17
(3)
◽
pp. 721-725
◽
2013 ◽
Vol 724-725
◽
pp. 686-691
1998 ◽
Vol 13
(8)
◽
pp. 715-720
◽
Keyword(s):