Combined beam profile reflectometry, beam profile ellipsometry and ultraviolet-visible spectrophotometry for the characterization of ultrathin oxide-nitride-oxide films on silicon

1999 ◽  
Vol 17 (2) ◽  
pp. 380-384 ◽  
Author(s):  
J. M. Leng ◽  
J. Opsal ◽  
D. E. Aspnes
Keyword(s):  
Oxide Films ◽  
Beam Profile ◽  
Visible Spectrophotometry ◽  
Nitride Oxide ◽  
Ultrathin Oxide

Ultrathin oxide‐nitride‐oxide films

1990 ◽  
Vol 57 (12) ◽  
pp. 1248-1250 ◽  
Author(s):  
Z. A. Weinberg ◽  
K. J. Stein ◽  
T. N. Nguyen ◽  
J. Y. Sun
Keyword(s):  
Oxide Films ◽  
Nitride Oxide ◽  
Ultrathin Oxide

Thickness determination of ultrathin oxide films and its application in magnetic tunnel junctions

2006 ◽  
Vol 35 (12) ◽  
pp. 2142-2146 ◽  
Author(s):  
J. Joshua Yang ◽  
Chengxiang Ji ◽  
Ying Yang ◽  
Y. Austin Chang ◽  
Feng X. Liu ◽  
...  
Keyword(s):  
Tunnel Junctions ◽  
Oxide Films ◽  
Magnetic Tunnel Junctions ◽  
Thickness Determination ◽  
Ultrathin Oxide Films ◽  
Ultrathin Oxide

scholarly journals Zoology of spin and orbital fluctuations in ultrathin oxide films

2021 ◽  
Vol 104 (2) ◽  
Author(s):  
Matthias Pickem ◽  
Josef Kaufmann ◽  
Karsten Held ◽  
Jan M. Tomczak
Keyword(s):  
Oxide Films ◽  
Ultrathin Oxide Films ◽  
Ultrathin Oxide

Characterization of Oxide Films by Electrochemical Impedance

2019 ◽  
Vol 13 (13) ◽  
pp. 115-128 ◽  
Author(s):  
Isabelle Frateur
Keyword(s):  
Electrochemical Impedance ◽  
Oxide Films

Surface characterization of thin silicon-rich oxide films

2011 ◽  
Vol 993 (1-3) ◽  
pp. 214-218 ◽  
Author(s):  
D. Ristić ◽  
V. Holý ◽  
M. Ivanda ◽  
M. Marciuš ◽  
M. Buljan ◽  
...  
Keyword(s):  
Surface Characterization ◽  
Oxide Films ◽  
Thin Silicon

Characterization of amorphous aluminum oxide films prepared by the pyrosol process

2000 ◽  
Vol 368 (1) ◽  
pp. 74-79 ◽  
Author(s):  
A. Ortiz ◽  
J.C. Alonso ◽  
V. Pankov ◽  
A. Huanosta ◽  
E. Andrade
Keyword(s):  
Aluminum Oxide ◽  
Oxide Films
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