Transparent barrier coatings on polyethylene terephthalate by single- and dual-frequency plasma-enhanced chemical vapor deposition
1998 ◽
Vol 16
(6)
◽
pp. 3190-3198
◽
High-Performance SiOF Film Fabricated Using a Dual-Frequency-Plasma Chemical Vapor Deposition system
2004 ◽
Vol 43
(9A)
◽
pp. 5984-5989
◽
2004 ◽
Vol 33
(5)
◽
pp. 400-407
◽
Keyword(s):
Keyword(s):
2015 ◽
Vol 18
(1)
◽
2011 ◽
Vol 46
(15)
◽
pp. 5085-5089
◽
2021 ◽
Vol 39
(4)
◽
pp. 042203
Keyword(s):