New-type microwave plasma source excited by azimuthally symmetric surface waves with magnetic multicusp fields

1998 ◽  
Vol 16 (5) ◽  
pp. 2832-2839 ◽  
Author(s):  
Mutumi Tuda ◽  
Kouichi Ono
Keyword(s):  
Surface Waves ◽  
Microwave Plasma ◽  
Plasma Source ◽  
New Type ◽  
Symmetric Surface

Large-diameter microwave plasma source excited by azimuthally symmetric surface waves

2000 ◽  
Vol 18 (3) ◽  
pp. 840-848 ◽  
Author(s):  
Mutumi Tuda ◽  
Kouichi Ono ◽  
Hiroki Ootera ◽  
Masaaki Tsuchihashi ◽  
Minoru Hanazaki ◽  
...  
Keyword(s):  
Surface Waves ◽  
Microwave Plasma ◽  
Large Diameter ◽  
Plasma Source ◽  
Symmetric Surface

A large-volume N2–Ar microwave plasma source based on surface waves

Vacuum ◽  
2004 ◽  
Vol 76 (2-3) ◽  
pp. 343-346 ◽  
Author(s):  
C.M. Ferreira ◽  
E. Tatarova ◽  
J. Henriques ◽  
F.M. Dias
Keyword(s):  
Surface Waves ◽  
Large Volume ◽  
Microwave Plasma ◽  
Plasma Source

scholarly journals A New Stripline-Based Atmospheric Pressure Microwave Plasma Sheet Source Designed for Surface Modification of Materials

Materials ◽  
2021 ◽  
Vol 14 (23) ◽  
pp. 7212
Author(s):  
Helena Nowakowska ◽  
Dariusz Czylkowski ◽  
Bartosz Hrycak ◽  
Mariusz Jasiński
Keyword(s):  
Surface Modification ◽  
Atmospheric Pressure ◽  
Microwave Plasma ◽  
Coaxial Line ◽  
Plasma Source ◽  
Power Flux ◽  
Power Characteristics ◽  
Radiated Power ◽  
New Type ◽  
The Difference

A new type of microwave plasma source is presented in which plasma at atmospheric pressure is generated inside a quartz rectangular flat box placed in a stripline supplied by a 2.45 GHz coaxial line. The plasma has a sheet shape and is designed for surface modification. Electric field and power flux distributions, tuning characteristics, and power characteristics (ratios of radiated, absorbed, and entering power) are numerically studied for three configurations: open, semi-closed, and closed. The calculations show that near-zero radiation reduction is possible only for the closed configuration, while the ratio of radiated power to entering power is always greater than 30% for the other configurations. The moving plunger is not sufficient for the ratio of reflected to incident power to fall below 20% for both the closed and open configurations. This is possible for the semi-closed configuration, but then the radiated power is the highest. The experiment shows that for the same entering power, the plasma volume is largest for the closed configuration and smallest for the open configuration, which we attribute to the difference in radiated power. The plasma generated using the closed stripline configuration has a larger volume than plasma generated using the rectangular waveguide.

scholarly journals A new type of non-thermal atmospheric pressure plasma source based on a waveguide bridge

2021 ◽  
Vol 2064 (1) ◽  
pp. 012131
Author(s):  
V N Tikhonov ◽  
S A Gorbatov ◽  
I A Ivanov ◽  
A V Tikhonov
Keyword(s):  
Atmospheric Pressure ◽  
Microwave Plasma ◽  
Short Circuit ◽  
Atmospheric Pressure Plasma ◽  
Plasma Source ◽  
Gas Temperature ◽  
Matched Load ◽  
Microwave Source ◽  
New Type ◽  
Complexity Cost

Abstract A new type of microwave source of non-thermal atmospheric pressure plasmas, presented earlier by the authors, has both the characteristics of a dielectric barrier discharge (in terms of the configuration and low gas temperature) and an ability to form a “clean” plasma jet like a classical microwave plasma torch. However, the need to use a circulator leads to a significant increase in complexity, cost and weight of the installation as a whole. The basis of the presented plasma source is a three-decibel waveguide bridge with connection through a narrow wall. Both output arms of the bridge are loaded on identical short-circuited segments of waveguides. The discharge tube passes across the waveguides at a distance of a quarter of the wavelength from the short circuit. Since the output arms of the bridge are always loaded symmetrically, the generator’s power which is reflected from the short circuits or not be absorbed in the microwave discharge, enters the decoupled arm of the bridge that is connected to the matched load. Thus, the magnetron is protected from the reflected wave without the need for an expensive circulator, in any case.

Simple low‐cost microwave plasma source

1986 ◽  
Vol 57 (2) ◽  
pp. 164-166 ◽  
Author(s):  
L. G. Meiners ◽  
D. B. Alford
Keyword(s):  
Microwave Plasma ◽  
Low Cost ◽  
Plasma Source
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