scholarly journals Theoretical and experimental investigations of surface-waves plasma column and microwave plasma source for applications in reconfigurable plasma antenna

2017 ◽  
Vol 59 (4) ◽  
pp. 806-811 ◽  
Author(s):  
Mohammad Mahdi Abbasi ◽  
Shahrooz Asadi
Keyword(s):  
Surface Waves ◽  
Plasma Column ◽  
Microwave Plasma ◽  
Plasma Source ◽  
Experimental Investigations ◽  
Plasma Antenna

Experimental investigations of the propagation of surface waves along a plasma column

1982 ◽  
Vol 24 (11) ◽  
pp. 1331-1400 ◽  
Author(s):  
M Moisan ◽  
A Shivarova ◽  
A W Trivelpiece
Keyword(s):  
Surface Waves ◽  
Plasma Column ◽  
Experimental Investigations

A large-volume N2–Ar microwave plasma source based on surface waves

Vacuum ◽  
2004 ◽  
Vol 76 (2-3) ◽  
pp. 343-346 ◽  
Author(s):  
C.M. Ferreira ◽  
E. Tatarova ◽  
J. Henriques ◽  
F.M. Dias
Keyword(s):  
Surface Waves ◽  
Large Volume ◽  
Microwave Plasma ◽  
Plasma Source

Large-diameter microwave plasma source excited by azimuthally symmetric surface waves

2000 ◽  
Vol 18 (3) ◽  
pp. 840-848 ◽  
Author(s):  
Mutumi Tuda ◽  
Kouichi Ono ◽  
Hiroki Ootera ◽  
Masaaki Tsuchihashi ◽  
Minoru Hanazaki ◽  
...  
Keyword(s):  
Surface Waves ◽  
Microwave Plasma ◽  
Large Diameter ◽  
Plasma Source ◽  
Symmetric Surface

Simple low‐cost microwave plasma source

1986 ◽  
Vol 57 (2) ◽  
pp. 164-166 ◽  
Author(s):  
L. G. Meiners ◽  
D. B. Alford
Keyword(s):  
Microwave Plasma ◽  
Low Cost ◽  
Plasma Source

scholarly journals A Linear Microwave Plasma Source Using a Circular Waveguide Filled with a Relatively High-Permittivity Dielectric: Comparison with a Conventional Quasi-Coaxial Line Waveguide

2021 ◽  
Vol 11 (12) ◽  
pp. 5358
Author(s):  
Ju-Hong Cha ◽  
Sang-Woo Kim ◽  
Ho-Jun Lee
Keyword(s):  
Electron Density ◽  
Microwave Plasma ◽  
Circular Waveguide ◽  
Coaxial Line ◽  
Plasma Source ◽  
Tangential Plane ◽  
High Permittivity ◽  
Deposition Area ◽  
Extended Plasma ◽  
Transverse Electromagnetic

For a conventional linear microwave plasma source (LMPS) with a quasi-coaxial line transverse electromagnetic (TEM) waveguide, a linearly extended plasma is sustained by the surface wave outside the tube. Due to the characteristics of the quasi-coaxial line MPS, it is easy to generate a uniform plasma with radially omnidirectional surfaces, but it is difficult to maximize the electron density in a curved selected region. For the purpose of concentrating the plasma density in the deposition area, a novel LMPS which is suitable for curved structure deposition has been developed and compared with the conventional LMPS. As the shape of a circular waveguide, it is filled with relatively high-permittivity dielectric instead of a quasi-coaxial line waveguide. Microwave power at 2.45 GHz is transferred to the plasma through the continuous cylindrical-slotted line antenna, and the radiated electric field in the radial direction is made almost parallel to the tangential plane of the window surface. This research includes the advanced 3D numerical analysis and compares the results with the experiment. It shows that the electron density in the deposition area is higher than that of the conventional quasi-coaxial line plasma MPS.

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