Platinum etching in Ar/O2 mixed gas plasma with a thin SiO2 etching mask

1998 ◽  
Vol 16 (2) ◽  
pp. 502-508 ◽  
Author(s):  
Teruo Shibano ◽  
Keisuke Nakamura ◽  
Tatsuo Oomori
Keyword(s):  
Mixed Gas ◽  
Gas Plasma ◽  
Etching Mask ◽  
Sio2 Etching

Improving the analytical performance of electrothermal vaporization coupled to inductively coupled plasma optical emission spectrometry using a mixed-gas plasma

2019 ◽  
Vol 34 (5) ◽  
pp. 891-898 ◽  
Author(s):  
Guilherme Luiz Scheffler ◽  
Dirce Pozebon ◽  
Diane Beauchemin
Keyword(s):  
Inductively Coupled Plasma ◽  
Limit Of Detection ◽  
Optical Emission ◽  
Emission Spectrometry ◽  
Solid Sampling ◽  
Electrothermal Vaporization ◽  
Mixed Gas ◽  
Inductively Coupled ◽  
Gas Plasma ◽  
Plasma Optical Emission Spectrometry

Adding nitrogen to the plasma gas in ICPOES significantly improves sensitivity and limit of detection for solid sampling ETV.

Towards the reduction of matrix effects in inductively coupled plasma optical emission spectrometry: an argon–nitrogen–hydrogen mixed-gas plasma for the analysis of geological and environmental samples

2017 ◽  
Vol 32 (9) ◽  
pp. 1688-1696 ◽  
Author(s):  
Yoseif Makonnen ◽  
William R. MacFarlane ◽  
Majdi L. Geagea ◽  
Diane Beauchemin
Keyword(s):  
Environmental Samples ◽  
Inductively Coupled Plasma ◽  
Matrix Effects ◽  
Optical Emission ◽  
Emission Spectrometry ◽  
Mixed Gas ◽  
Inductively Coupled ◽  
Gas Plasma ◽  
Plasma Optical Emission Spectrometry ◽  
Internal Standardization

A robust Ar–N2–H2plasma enables accurate multielemental analysis of geological and environmental samples without matrix-matching or internal standardization.

H2–CH4 mixed gas plasma treatment on LP-MOCVD ZnO:B for amorphous silicon thin film solar cells

2013 ◽  
Vol 116 ◽  
pp. 231-237 ◽  
Author(s):  
Li Wang ◽  
Xiaodan Zhang ◽  
Xu Yang ◽  
Changchun Wei ◽  
Xinliang Chen ◽  
...  
Keyword(s):  
Thin Film ◽  
Solar Cells ◽  
Plasma Treatment ◽  
Amorphous Silicon ◽  
Thin Film Solar Cells ◽  
Mixed Gas ◽  
Silicon Thin Film ◽  
Gas Plasma

Rice Slurry Analysis Using Mixed-Gas Plasma and Axially Viewed ICP OES

2013 ◽  
Vol 7 (7) ◽  
pp. 1415-1423 ◽  
Author(s):  
Guilherme Luiz Scheffler ◽  
Valderi Luiz Dressler ◽  
Dirce Pozebon
Keyword(s):  
Icp Oes ◽  
Mixed Gas ◽  
Gas Plasma
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