Tribological properties of diamond-like carbon films deposited by negative carbon ion beam

1998 ◽  
Vol 16 (6) ◽  
pp. 3554-3558 ◽  
Author(s):  
M. H. Sohn ◽  
Y. O. Ahn ◽  
Y. W. Ko ◽  
S. R. Hah ◽  
T. E. Fischer ◽  
...  
Keyword(s):  
Tribological Properties ◽  
Ion Beam ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Carbon Ion ◽  
Carbon Ion Beam

Effect of substrate temperature on the structure and chemical bonds of carbon films deposited with a mass-separated carbon ion beam

2003 ◽  
Vol 12 (10-11) ◽  
pp. 2088-2092 ◽  
Author(s):  
Kazuhiro Yamamoto ◽  
Toshiya Watanabe ◽  
Koichiro Wazumi ◽  
Yoshinori Koga ◽  
Sumio Iijima
Keyword(s):  
Substrate Temperature ◽  
Ion Beam ◽  
Carbon Films ◽  
Chemical Bonds ◽  
Carbon Ion ◽  
Carbon Ion Beam

Tribological properties of diamond-like carbon films prepared by mass-separated ion beam deposition

2002 ◽  
Vol 11 (3-6) ◽  
pp. 1130-1134 ◽  
Author(s):  
Kazuhiro Yamamoto ◽  
Koichiro Wazumi ◽  
Toshiya Watanabe ◽  
Yoshinori Koga ◽  
Sumio Iijima
Keyword(s):  
Tribological Properties ◽  
Ion Beam ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Ion Beam Deposition ◽  
Beam Deposition

Carbon transport in Si(001) and nucleation of diamond-like carbon layers during mass selected carbon ion beam deposition

1998 ◽  
Vol 7 (1) ◽  
pp. 15-22 ◽  
Author(s):  
S. Christiansen ◽  
M. Albrecht ◽  
G. Frank ◽  
H.P. Strunk ◽  
C. Ronning ◽  
...  
Keyword(s):  
Ion Beam ◽  
Diamond Like Carbon ◽  
Carbon Ion ◽  
Ion Beam Deposition ◽  
Carbon Ion Beam ◽  
Beam Deposition ◽  
Carbon Transport

Modification of carbon films by high-power proton-carbon ion beam of nanosecond duration

2011 ◽  
Vol 5 (2) ◽  
pp. 246-248
Author(s):  
V. S. Kovivchak ◽  
T. V. Panova ◽  
O. V. Krivozubov ◽  
N. A. Davletkil’deev
Keyword(s):  
High Power ◽  
Ion Beam ◽  
Carbon Films ◽  
Nanosecond Duration ◽  
Carbon Ion ◽  
Carbon Ion Beam

Advanced monochrome gray-scale TFT-LCD using diamond-like-carbon/ion-beam alignment technology

2004 ◽  
Vol 12 (4) ◽  
pp. 435 ◽  
Author(s):  
Yoshiki Nakagawa ◽  
Hiroyuki Satoh ◽  
Toshifumi Nakamura ◽  
Kenji Okajima ◽  
Sueharu Maenosono ◽  
...  
Keyword(s):  
Ion Beam ◽  
Diamond Like Carbon ◽  
Gray Scale ◽  
Carbon Ion ◽  
Carbon Ion Beam

A Novel Rectilinear Negative Carbon Ion Beam Source for Large-Area Amorphous Diamond Like Carbon Coatings

1995 ◽  
Vol 396 ◽  
Author(s):  
M.H. Sohn ◽  
YO. Ahn ◽  
Y.W. Ko ◽  
Y. Park ◽  
S.I. Kim
Keyword(s):  
Ion Beam ◽  
High Vacuum ◽  
Ion Beams ◽  
Ion Source ◽  
Hydrogen Gas ◽  
Diamond Like Carbon ◽  
Large Area ◽  
Beam Source ◽  
Carbon Ion ◽  
Carbon Ion Beam

AbstractA novel rectilinear negative carbon ion beam source for large-area coatings has been developed, based on SKION's Solid State Ion Beam Technology. The negative carbon ion beam is effectively produced by a primary cesium ion bombardment and the secondary negative carbon ion yield has been observed to be about 0.5. The ion source produces a negative carbon ion current density of 0.25 mA/cm2 at the extraction voltage of 4 kV. The ion beam energy can be independently controlled from 0 eV to 300 eV. Due to the rectilinear geometry for the production of ion beams, the scale-up of the ion beam in length direction can be easily obtained with no limit. Furthermore, the ion source uses no gas discharge to generate ion beams and does not use any hydrogen gas. The ion source can be operated in a high vacuum (<10-7 Torr), and the cesium vapors are filtered and recirculated. The ion source produces ultra-hard (50 GPa), atomically smooth (< 1 nm Ra), and hydrogen-free amorphous diamond-like-carbon (DLC) films over large areas.

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