Characterization of a low‐frequency inductively coupled plasma source

1996 ◽  
Vol 14 (3) ◽  
pp. 1096-1101 ◽  
Author(s):  
M. Tuszewski ◽  
J. A. Tobin
Keyword(s):  
Inductively Coupled Plasma ◽  
Low Frequency ◽  
Plasma Source ◽  
Inductively Coupled

Characterization of a high-frequency inductively coupled plasma source

2006 ◽  
Vol 506-507 ◽  
pp. 469-473 ◽  
Author(s):  
D.S. Lee ◽  
H.S. Jun ◽  
H.Y. Chang
Keyword(s):  
High Frequency ◽  
Inductively Coupled Plasma ◽  
Plasma Source ◽  
Inductively Coupled

scholarly journals Optical characterization of a novel miniature microwave inductively coupled plasma source in nitrogen flow

2018 ◽  
Vol 27 (12) ◽  
pp. 12LT01 ◽  
Author(s):  
Ilija Stefanović ◽  
Nikita Bibinov ◽  
Horia-Eugen Porteanu ◽  
Michael Klute ◽  
Ralf-Peter Brinkmann ◽  
...  
Keyword(s):  
Inductively Coupled Plasma ◽  
Plasma Source ◽  
Optical Characterization ◽  
Nitrogen Flow ◽  
Inductively Coupled

Characterization of a side-type ferrite inductively coupled plasma source for large-scale processing

2008 ◽  
Vol 17 (1) ◽  
pp. 015014 ◽  
Author(s):  
Kyeonghyo Lee ◽  
Youngkwang Lee ◽  
Sungwon Jo ◽  
Chin-Wook Chung ◽  
Valery Godyak
Keyword(s):  
Inductively Coupled Plasma ◽  
Large Scale ◽  
Plasma Source ◽  
Inductively Coupled

Experimental and theoretical characterization of an inductively coupled plasma source

2001 ◽  
Vol 90 (2) ◽  
pp. 587-598 ◽  
Author(s):  
P. Scheubert ◽  
U. Fantz ◽  
P. Awakowicz ◽  
H. Paulin
Keyword(s):  
Inductively Coupled Plasma ◽  
Plasma Source ◽  
Inductively Coupled ◽  
Theoretical Characterization
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