scholarly journals Large area radio frequency plasma for microelectronics processing

1995 ◽  
Vol 13 (3) ◽  
pp. 871-874 ◽  
Author(s):  
Z. Yu ◽  
D. Shaw ◽  
P. Gonzales ◽  
G. J. Collins
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Plasma ◽  
Large Area ◽  
Frequency Plasma

Development and first results of large area radio frequency plasma source for EAST neutral beam injector

2019 ◽  
Vol 138 ◽  
pp. 24-26
Author(s):  
Yahong Xie ◽  
Chundong Hu ◽  
Caichao Jiang ◽  
Jianglong Wei ◽  
Yuming Gu ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Plasma Source ◽  
Neutral Beam ◽  
Radio Frequency Plasma ◽  
Large Area ◽  
Neutral Beam Injector ◽  
Frequency Plasma ◽  
First Results

Large-area radio frequency plasma sources for fusion applications

1998 ◽  
Vol 69 (2) ◽  
pp. 956-958 ◽  
Author(s):  
W. Kraus ◽  
E. Speth ◽  
J.-H. Feist ◽  
P. Frank ◽  
B. Heinemann ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Plasma ◽  
Large Area ◽  
Plasma Sources ◽  
Frequency Plasma ◽  
Fusion Applications

Nonuniform radio-frequency plasma potential due to edge asymmetry in large-area radio-frequency reactors

2004 ◽  
Vol 96 (10) ◽  
pp. 5429-5440 ◽  
Author(s):  
A. A. Howling ◽  
L. Sansonnens ◽  
J. Ballutaud ◽  
Ch. Hollenstein ◽  
J. P. M. Schmitt
Keyword(s):  
Radio Frequency ◽  
Plasma Potential ◽  
Radio Frequency Plasma ◽  
Large Area ◽  
Frequency Plasma

scholarly journals Modification of a Fur Semi-finished Sheepskins by Radio Frequency Plasma in an Inert Gas Medium

2021 ◽  
Vol 1923 (1) ◽  
pp. 012020
Author(s):  
E A Pankova ◽  
F S Sharifullin ◽  
G R Rakhmatullina ◽  
R R Shagivalieva ◽  
V S Zheltukhin
Keyword(s):  
Radio Frequency ◽  
Inert Gas ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Gas Medium

Nitrogen doping of molecular beam epitaxially grown CdTe with a radio-frequency plasma source

1994 ◽  
Vol 138 (1-4) ◽  
pp. 443-447 ◽  
Author(s):  
K.A. Dhese ◽  
D.E. Ashenford ◽  
J.E. Nicholls ◽  
P. Devine ◽  
B. Lunn ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Nitrogen Doping ◽  
Molecular Beam ◽  
Plasma Source ◽  
Radio Frequency Plasma ◽  
Frequency Plasma
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