Ionized magnetron sputter deposition of amorphous carbon nitride thin films

1995 ◽  
Vol 13 (3) ◽  
pp. 1063-1066 ◽  
Author(s):  
D. Li ◽  
S. Lopez ◽  
Y. W. Chung ◽  
M. S. Wong ◽  
W. D. Sproul
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Carbon Nitride ◽  
Sputter Deposition ◽  
Magnetron Sputter Deposition ◽  
Amorphous Carbon Nitride ◽  
Magnetron Sputter

Reversible photo-induced deformation of amorphous carbon nitride thin films

2014 ◽  
Vol 41 ◽  
pp. 20-24 ◽  
Author(s):  
M. Aono ◽  
T. Harata ◽  
N. Kitazawa ◽  
Y. Watanabe
Keyword(s):  
Thin Films ◽  
Amorphous Carbon ◽  
Carbon Nitride ◽  
Amorphous Carbon Nitride

Single‐target magnetron sputter deposition of high‐Tcsuperconducting Bi‐Sr‐Ca‐Cu‐O thin films

1988 ◽  
Vol 64 (10) ◽  
pp. 5259-5261 ◽  
Author(s):  
Neelkanth G. Dhere ◽  
John P. Goral ◽  
Alice R. Mason ◽  
Ramesh G. Dhere ◽  
Ronald H. Ono
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Single Target ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter

Single composite target magnetron sputter deposition of crystalline and amorphous SiC thin films

2018 ◽  
Vol 5 (3) ◽  
pp. 036410 ◽  
Author(s):  
Poreddy Chaitanya Akshara ◽  
Guruswamy Rajaram ◽  
M Ghanashyam Krishna
Keyword(s):  
Thin Films ◽  
Sputter Deposition ◽  
Composite Target ◽  
Magnetron Sputter Deposition ◽  
Magnetron Sputter ◽  
Amorphous Sic

Electrical resistivity response of amorphous carbon nitride thin films in various gas atmospheres

2015 ◽  
Vol 54 (4) ◽  
pp. 041401 ◽  
Author(s):  
Naoyuki Tamura ◽  
Masami Aono ◽  
Hiroshi Abe ◽  
Nobuaki Kitazawa ◽  
Yoshihisa Watanabe
Keyword(s):  
Thin Films ◽  
Electrical Resistivity ◽  
Amorphous Carbon ◽  
Carbon Nitride ◽  
Amorphous Carbon Nitride
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