Low outgassing residual gas analyzer with a beryllium–copper‐alloy‐flanged ion source

1995 ◽  
Vol 13 (2) ◽  
pp. 497-500 ◽  
Author(s):  
Fumio Watanabe ◽  
Akinari Kasai
Keyword(s):  
Copper Alloy ◽  
Ion Source ◽  
Gas Analyzer ◽  
Beryllium Copper ◽  
Residual Gas

Optimization of closed ion source for a high-sensitivity residual gas analyzer

2014 ◽  
Vol 32 (2) ◽  
pp. 021603
Author(s):  
Cheolsu Han ◽  
Jong Rok Ahn ◽  
Sang Jung Ahn ◽  
Chang Joon Park
Keyword(s):  
High Sensitivity ◽  
Ion Source ◽  
Gas Analyzer ◽  
Residual Gas

BERYLCO 25

Alloy Digest ◽  
1973 ◽  
Vol 22 (9) ◽  
Keyword(s):  
Corrosion Resistance ◽  
Physical Properties ◽  
Tensile Properties ◽  
Copper Alloy ◽  
High Performance ◽  
High Strength ◽  
Heat Treating ◽  
Beryllium Copper

Abstract BERYLCO 25 is the standard high-performance beryllium copper alloy most widely used because of its high strength, hardness and excellent spring characteristics. BERYLCO 25 is the updated version of BERYLCO 25S (Alloy Digest Cu-3, November 1952). This datasheet provides information on composition, physical properties, hardness, elasticity, and tensile properties. It also includes information on corrosion resistance as well as forming, heat treating, machining, and joining. Filing Code: Cu-271. Producer or source: Kawecki Berylco Industries Inc..

CONDULOY

Alloy Digest ◽  
1953 ◽  
Vol 2 (10) ◽  
Keyword(s):  
Mechanical Properties ◽  
Heat Treatment ◽  
Physical Properties ◽  
Tensile Properties ◽  
Copper Alloy ◽  
Heat Treating ◽  
Age Hardening ◽  
Beryllium Copper ◽  
Hardening Heat Treatment

Abstract CONDULOY is a low beryllium-copper alloy containing about 1.5% nickel. It responds to age-hardening heat treatment for improved mechanical properties. This datasheet provides information on composition, physical properties, hardness, elasticity, and tensile properties. It also includes information on casting, heat treating, machining, and joining. Filing Code: Cu-11. Producer or source: Brush Beryllium Company.

BRUSH CASTING ALLOY 21C

Alloy Digest ◽  
1992 ◽  
Vol 41 (8) ◽  
Keyword(s):  
Physical Properties ◽  
Tensile Properties ◽  
Copper Alloy ◽  
High Strength ◽  
Heat Treating ◽  
Casting Alloy ◽  
Alloying Element ◽  
Beryllium Copper

Abstract BRUSH CASTING ALLOY 21C is a beryllium copper alloy of high strength with cobalt as the second alloying element (1.0 to 2.0% Co). Use is in age-hardened temper. This datasheet provides information on composition, physical properties, hardness, and tensile properties. It also includes information on casting, heat treating, and machining. Filing Code: Cu-575. Producer or source: Brush Wellman Inc..

BRUSH ALLOY M25

Alloy Digest ◽  
1970 ◽  
Vol 19 (6) ◽  
Keyword(s):  
Corrosion Resistance ◽  
Physical Properties ◽  
Tensile Properties ◽  
Copper Alloy ◽  
High Strength ◽  
Heat Treating ◽  
Age Hardening ◽  
Beryllium Copper ◽  
Screw Machine ◽  
Electrical Components

Abstract BRUSH alloy M25 is a free-machining beryllium-copper alloy having good response to age-hardening for high strength, hardness, fatigue and corrosion resistance. It is recommended for screw machine products, gears, shafts, hardware, fasteners, connectors, electronic and electrical components. This datasheet provides information on composition, physical properties, hardness, elasticity, and tensile properties. It also includes information on corrosion resistance as well as forming, heat treating, machining, and joining. Filing Code: Cu-217. Producer or source: Brush Beryllium Company.

COPPER ALLOY No. C81400

Alloy Digest ◽  
1985 ◽  
Vol 34 (12) ◽  
Keyword(s):  
Physical Properties ◽  
Tensile Properties ◽  
Copper Alloy ◽  
Health Hazard ◽  
Heat Treating ◽  
Class Ii ◽  
Resistance Wire ◽  
Beryllium Copper ◽  
Trade Name ◽  
Association Class

Abstract Copper Alloy No. C81400 is a precipitation-hardenable alloy of moderate hardness and strength. Its common name is beryllium-modified chromium copper and a previous trade name was Beryllium Copper 70C. Because of its beryllium content, its manufacture may present a health hazard. Typical uses comprise electrical parts that meet RWMA (Resistance Wire Manufacturer's Association) Class II standards. This datasheet provides information on composition, physical properties, hardness, elasticity, and tensile properties. It also includes information on casting, heat treating, machining, and joining. Filing Code: Cu-504. Producer or source: Copper alloy foundries.

scholarly journals Silicon Oxide Etching Process of NF3 and F3NO Plasmas with a Residual Gas Analyzer

Materials ◽  
2021 ◽  
Vol 14 (11) ◽  
pp. 3026
Author(s):  
Woo-Jae Kim ◽  
In-Young Bang ◽  
Ji-Hwan Kim ◽  
Yeon-Soo Park ◽  
Hee-Tae Kwon ◽  
...  
Keyword(s):  
Greenhouse Gas ◽  
Silicon Oxide ◽  
Gas Analysis ◽  
Gas Analyzer ◽  
Dc Offset ◽  
Cleaning Performance ◽  
Oxide Etching ◽  
Residual Gas ◽  
Etch Rates ◽  
Very High

The use of NF3 is significantly increasing every year. However, NF3 is a greenhouse gas with a very high global warming potential. Therefore, the development of a material to replace NF3 is required. F3NO is considered a potential replacement to NF3. In this study, the characteristics and cleaning performance of the F3NO plasma to replace the greenhouse gas NF3 were examined. Etching of SiO2 thin films was performed, the DC offset of the plasma of both gases (i.e., NF3 and F3NO) was analyzed, and a residual gas analysis was performed. Based on the analysis results, the characteristics of the F3NO plasma were studied, and the SiO2 etch rates of the NF3 and F3NO plasmas were compared. The results show that the etch rates of the two gases have a difference of 95% on average, and therefore, the cleaning performance of the F3NO plasma was demonstrated, and the potential benefit of replacing NF3 with F3NO was confirmed.

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