Vacuum ultraviolet emission from microwave plasmas of hydrogen and its mixtures with helium and oxygen

Andreas Holländer; Michael R. Wertheimer

doi:10.1116/1.579271

Vacuum ultraviolet emission from microwave plasmas of hydrogen and its mixtures with helium and oxygen

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579271 ◽

1994 ◽

Vol 12 (3) ◽

pp. 879-882 ◽

Cited By ~ 25

Author(s):

Andreas Holländer ◽

Michael R. Wertheimer

Keyword(s):

Vacuum Ultraviolet ◽

Microwave Plasmas ◽

Ultraviolet Emission

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Vacuum ultraviolet emission from hydrogen microwave plasmas driven by surface waves

Plasma Sources Science and Technology ◽

10.1088/0963-0252/25/5/055010 ◽

2016 ◽

Vol 25 (5) ◽

pp. 055010 ◽

Cited By ~ 3

Author(s):

S Espinho ◽

E Felizardo ◽

E Tatarova

Keyword(s):

Surface Waves ◽

Vacuum Ultraviolet ◽

Microwave Plasmas ◽

Ultraviolet Emission

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Diagnostics of N2dissociation in RF plasmas by vacuum ultraviolet emission and absorption spectroscopy

Plasma Sources Science and Technology ◽

10.1088/0963-0252/17/2/024018 ◽

2008 ◽

Vol 17 (2) ◽

pp. 024018 ◽

Cited By ~ 13

Author(s):

Takeshi Kitajima ◽

Toshiki Nakano ◽

Seiji Samukawa ◽

Toshiaki Makabe

Keyword(s):

Absorption Spectroscopy ◽

Vacuum Ultraviolet ◽

Ultraviolet Emission ◽

Rf Plasmas

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Vacuum Ultraviolet Emission Following Impact of Li+ and He+ on He and Ne at 5-30 keV

IEEE Transactions on Nuclear Science ◽

10.1109/tns.1981.4331368 ◽

1981 ◽

Vol 28 (2) ◽

pp. 1156-1158

Author(s):

K. A. Jamison ◽

G. M. Thomson

Keyword(s):

Vacuum Ultraviolet ◽

Ultraviolet Emission

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Three-dimensional simulations of edge impurity flow obtained by the vacuum ultraviolet emission diagnostics in the Large Helical Device with EMC3-EIRENE

Nuclear Fusion ◽

10.1088/1741-4326/aace69 ◽

2018 ◽

Vol 58 (9) ◽

pp. 096024 ◽

Cited By ~ 5

Author(s):

S.Y. Dai ◽

T. Oishi ◽

G. Kawamura ◽

M. Kobayashi ◽

S. Morita ◽

...

Keyword(s):

Vacuum Ultraviolet ◽

Three Dimensional ◽

Ultraviolet Emission ◽

Three Dimensional Simulations

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Study of gasdynamic electron cyclotron resonance plasma vacuum ultraviolet emission to optimize negative hydrogen ion production efficiency

Review of Scientific Instruments ◽

10.1063/1.5128313 ◽

2020 ◽

Vol 91 (1) ◽

pp. 013517 ◽

Cited By ~ 1

Author(s):

R. L. Lapin ◽

V. A. Skalyga ◽

I. Izotov ◽

S. V. Razin ◽

R. A. Shaposhnikov ◽

...

Keyword(s):

Cyclotron Resonance ◽

Production Efficiency ◽

Vacuum Ultraviolet ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Hydrogen Ion ◽

Ultraviolet Emission ◽

Electron Cyclotron Resonance Plasma ◽

Ion Production ◽

Resonance Plasma

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Dissociative Excitation of Vacuum‐Ultraviolet Emission Features by Electron Impact on Molecular Gases. II. N2

The Journal of Chemical Physics ◽

10.1063/1.1675725 ◽

1971 ◽

Vol 55 (12) ◽

pp. 5582-5588 ◽

Cited By ~ 53

Author(s):

M. J. Mumma ◽

E. C. Zipf

Keyword(s):

Electron Impact ◽

Vacuum Ultraviolet ◽

Dissociative Excitation ◽

Ultraviolet Emission ◽

Molecular Gases

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Polymer oxidation induced by vacuum-ultraviolet emission

Surface and Coatings Technology ◽

10.1016/0257-8972(95)08333-2 ◽

1995 ◽

Vol 74-75 ◽

pp. 55-58 ◽

Cited By ~ 10

Author(s):

A. Holländer ◽

J.E. Klemberg-Sapieha ◽

M.R. Wertheimer

Keyword(s):

Vacuum Ultraviolet ◽

Ultraviolet Emission ◽

Polymer Oxidation

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Vacuum ultraviolet emission from microwave Ar-H2 plasmas

Applied Physics Letters ◽

10.1063/1.4796134 ◽

2013 ◽

Vol 102 (11) ◽

pp. 114101 ◽

Cited By ~ 5

Author(s):

S. Espinho ◽

E. Felizardo ◽

E. Tatarova ◽

F. M. Dias ◽

C. M. Ferreira

Keyword(s):

Vacuum Ultraviolet ◽

Ultraviolet Emission

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Theoretical studies of vacuum ultraviolet emission spectra of NeLi+ and ArLi+

The Journal of Chemical Physics ◽

10.1063/1.459741 ◽

1991 ◽

Vol 94 (5) ◽

pp. 3707-3714 ◽

Cited By ~ 9

Author(s):

Suehiro Iwata ◽

Shinkoh Nanbu ◽

Hideki Kitajima

Keyword(s):

Vacuum Ultraviolet ◽

Emission Spectra ◽

Theoretical Studies ◽

Ultraviolet Emission

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Measurements of electron density in helicon-wave excited high-density reactive plasmas by vacuum ultraviolet emission spectroscopy

Plasma Sources Science and Technology ◽

10.1088/0963-0252/7/1/006 ◽

1998 ◽

Vol 7 (1) ◽

pp. 36-40 ◽

Cited By ~ 2

Author(s):

Y Kawai ◽

K Sasaki ◽

K Kadota

Keyword(s):

Electron Density ◽

Emission Spectroscopy ◽

Vacuum Ultraviolet ◽

High Density ◽

Ultraviolet Emission ◽

Helicon Wave

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