Spatially resolved optical emission for characterization of a planar radio frequency inductively coupled discharge
1994 ◽
Vol 12
(5)
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pp. 2775-2779
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2013 ◽
Vol 10
(84)
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pp. 20130296
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2018 ◽
Vol 442
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pp. 412-416
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Keyword(s):
2008 ◽
Vol 22
(15)
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pp. 1487-1495
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