Fourier‐transform infrared absorption spectrometry measurements of a CF4 discharge in an electron cyclotron resonance reactor
1994 ◽
Vol 12
(6)
◽
pp. 3120-3125
◽
1999 ◽
Vol 17
(5)
◽
pp. 2586-2592
◽
1993 ◽
Vol 11
(3)
◽
pp. 689-693
◽
1997 ◽
Vol 30
(8)
◽
pp. L23-L27
◽
Keyword(s):
1998 ◽
Vol 08
(PR7)
◽
pp. Pr7-265-Pr7-272
◽
1999 ◽
Vol 138-139
◽
pp. 285-291
◽
1984 ◽
Vol 45
(C1)
◽
pp. C1-961-C1-963
Keyword(s):