Effect of surface re‐emission on the surface roughness of film growth in low pressure chemical vapor deposition

1993 ◽  
Vol 11 (3) ◽  
pp. 557-568 ◽  
Author(s):  
Vivek K. Singh ◽  
Eric S. G. Shaqfeh
Keyword(s):  
Surface Roughness ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Film Growth ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Pressure Chemical ◽  
Effect Of Surface

Epitaxial film growth of chromium dioxide by low pressure chemical vapor deposition using chromium carbonyl

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Vol 518 (23) ◽  
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Author(s):  
Jinwen Wang ◽  
Manjit Pathak ◽  
Xing Zhong ◽  
Patrick LeClair ◽  
Tonya M. Klein ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Epitaxial Film ◽  
Film Growth ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Chromium Dioxide ◽  
Chromium Carbonyl ◽  
Pressure Chemical ◽  
Epitaxial Film Growth

Using tetrakis-diethylamido-hafnium for HfO2 thin-film growth in low-pressure chemical vapor deposition

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Vol 406 (1-2) ◽  
pp. 215-218 ◽  
Author(s):  
Yoshio Ohshita ◽  
Atsushi Ogura ◽  
Asako Hoshino ◽  
Shigeki Hiiro ◽  
Toshie Suzuki ◽  
...  
Keyword(s):  
Thin Film ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Film Growth ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Thin Film Growth ◽  
Pressure Chemical

In Situ Phosphorus-Doped Poly-Si by Low Pressure Chemical Vapor Deposition for Passivating Contacts

2020 ◽  
Author(s):  
Meric Firat ◽  
Hariharsudan Sivaramakrishnan Radhakrishnan ◽  
Maria Recaman Payo ◽  
Filip Duerinckx ◽  
Rajiv Sharma ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Pressure Chemical ◽  
Phosphorus Doped

A Novel Direct Liquid Injection Low Pressure Chemical Vapor Deposition System (DLI-LPCVD) for the Deposition of Thin Films

2017 ◽  
Vol 19 (8) ◽  
pp. 1700193 ◽  
Author(s):  
Mattias Vervaele ◽  
Bert De Roo ◽  
Jolien Debehets ◽  
Marilyne Sousa ◽  
Luman Zhang ◽  
...  
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Liquid Injection ◽  
Pressure Chemical ◽  
Direct Liquid Injection
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