Direct current bias as an ion current monitor in the transformer coupled plasma etcher

1993 ◽  
Vol 11 (6) ◽  
pp. 2911-2913 ◽  
Author(s):  
Yunju Ra ◽  
Ching‐Hwa Chen
Keyword(s):  
Direct Current ◽  
Ion Current ◽  
Direct Current Bias

Fibrous structures on diamond and carbon surfaces formed by hydrogen plasma under direct-current bias and field electron-emission properties

2003 ◽  
Vol 18 (2) ◽  
pp. 305-326 ◽  
Author(s):  
Koji Kobashi ◽  
Takeshi Tachibana ◽  
Yoshihiro Yokota ◽  
Nobuyuki Kawakami ◽  
Kazushi Hayashi ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Field Emission ◽  
Direct Current ◽  
Electron Emission ◽  
Microwave Plasma ◽  
Hydrogen Plasma ◽  
Polycrystalline Diamond ◽  
Metal Catalyst ◽  
Direct Current Bias ◽  
Conical Structures

Polycrystalline diamond films, single crystal bulk diamonds, and diamond powder were treated in microwave plasma of hydrogen at 1.6 torr under a negative direct-current bias of −150 to −300 V without metal catalyst. It was found that fibrous structures, uniformly elongated along the direction normal to the specimen surface, were formed on the diamond surfaces. Similar experiments for glasslike carbon resulted in conical structures with frizzy fibers at the tops. Transmission electron microscopy measurements indicated that the fibers formed on diamond consisted of randomly oriented diamond nanocrystals with diameters of less than 10 nm, while the conical structures formed on glasslike carbon consisted of graphite nanocrystals. Field emission measurements of the fibrous specimens exhibited better emission efficiency than untreated ones. The field emission electron microscopy of the fibrous glasslike carbon showed a presence of discrete electron emission sites at a density of approximately 10,000 sites/cm2.

Multilayer graphene frequency doubler using direct-current bias and reflector networks

2021 ◽  
Vol 54 (17) ◽  
pp. 175103
Author(s):  
Ying Hou ◽  
Manlai Ding ◽  
Yong Fang ◽  
Xueshi Hou ◽  
Xiaoling Zhong ◽  
...  
Keyword(s):  
Direct Current ◽  
Multilayer Graphene ◽  
Frequency Doubler ◽  
Direct Current Bias

A Frequency Reconfigurable Antenna based on Few Layer Graphene

2021 ◽  
Vol 36 (5) ◽  
pp. 542-547
Author(s):  
Sheng-lan Wang ◽  
Jing-Song Hong ◽  
Yan Deng ◽  
Zhi-jian Chen
Keyword(s):  
Experimental Evidence ◽  
Bias Voltage ◽  
Direct Current ◽  
Surface Impedance ◽  
Microstrip Line ◽  
Reconfigurable Antenna ◽  
Layer Graphene ◽  
Direct Current Bias ◽  
Few Layer Graphene ◽  
Frequency Reconfigurable Antenna

In this paper, a frequency reconfigurable antenna was presented. This antenna is made up of a square loop and a microstrip line with a gap, in which the few layer graphene (FLG) sheet is located to achieve frequency reconfigurable. FLG is likes a lumped resistor with resistance. And the surface impedance can be adjusted by applying a direct current bias voltage, which obtains two work modes that imitate switch. Additionally, the experimental evidence show the proposed frequency reconfigurable antenna can provide a tunable bandwidth.

Time evolution of an ion-ion plasma after the application of a direct current bias voltage

2002 ◽  
Vol 91 (10) ◽  
pp. 6282 ◽  
Author(s):  
Vikas Midha ◽  
Badri Ramamurthi ◽  
Demetre J. Economou
Keyword(s):  
Time Evolution ◽  
Bias Voltage ◽  
Direct Current ◽  
Ion Plasma ◽  
Direct Current Bias

scholarly journals WSN-Based Measurement of Ion-Current Density Under High-Voltage Direct Current Transmission Lines

IEEE Access ◽  
2019 ◽  
Vol 7 ◽  
pp. 10947-10955 ◽  
Author(s):  
Yong Cui ◽  
Xiao Song ◽  
Luxing Zhao ◽  
Haiwen Yuan ◽  
Guifang Wu ◽  
...  
Keyword(s):  
High Voltage ◽  
Direct Current ◽  
Current Density ◽  
Transmission Lines ◽  
Ion Current ◽  
High Voltage Direct Current ◽  
Current Transmission ◽  
Ion Current Density

Direct‐current bias effect on the synthesis of (001) textured diamond films on silicon

1995 ◽  
Vol 67 (11) ◽  
pp. 1555-1557 ◽  
Author(s):  
J. S. Lee ◽  
K. S. Liu ◽  
I‐Nan Lin
Keyword(s):  
Direct Current ◽  
Diamond Films ◽  
Bias Effect ◽  
Direct Current Bias

Long-term stable direct current bias operation in electro-optic polymer modulators with an electrically compatible multilayer structure

1997 ◽  
Vol 71 (16) ◽  
pp. 2236-2238 ◽  
Author(s):  
Yongqiang Shi ◽  
Wenshen Wang ◽  
Weiping Lin ◽  
David J. Olson ◽  
James H. Bechtel
Keyword(s):  
Direct Current ◽  
Multilayer Structure ◽  
Electro Optic ◽  
Direct Current Bias ◽  
Polymer Modulators
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