Effects of substrate bias frequency in an electron cyclotron resonance plasma reactor

1993 ◽  
Vol 11 (6) ◽  
pp. 2897-2902 ◽  
Author(s):  
J. B. O. Caughman ◽  
W. M. Holber
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Plasma Reactor ◽  
Electron Cyclotron ◽  
Substrate Bias ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

Spatially resolved ion velocity distributions in a diverging field electron cyclotron resonance plasma reactor

1990 ◽  
Vol 57 (12) ◽  
pp. 1188-1190 ◽  
Author(s):  
Dennis J. Trevor ◽  
Nader Sadeghi ◽  
Toshiki Nakano ◽  
Jacques Derouard ◽  
Richard A. Gottscho ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Plasma Reactor ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Spatially Resolved ◽  
Field Electron ◽  
Ion Velocity ◽  
Resonance Plasma
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