On the nature of zero temperature coefficient of resistance of RuO2 thin film resistor formation using in situ annealing
1993 ◽
Vol 11
(4)
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pp. 1052-1055
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2008 ◽
Vol 29
(3)
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pp. 212-214
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2016 ◽
Vol 07
(12)
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pp. 895-907
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Keyword(s):
2015 ◽
Vol 36
(3)
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pp. 271-273
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