Process effects on structural properties of TiO2 thin films by reactive sputtering

1992 ◽  
Vol 10 (4) ◽  
pp. 1479-1482 ◽  
Author(s):  
Dwi Wicaksana ◽  
Akihiko Kobayashi ◽  
Akira Kinbara
Keyword(s):  
Thin Films ◽  
Structural Properties ◽  
Reactive Sputtering ◽  
Tio2 Thin Films ◽  
Process Effects

scholarly journals Effect of total gas pressure and O2/N2 flow rate on the nanostructure of N-doped TiO2 thin films deposited by reactive sputtering

2014 ◽  
Vol 552 ◽  
pp. 10-17 ◽  
Author(s):  
M.A. Baker ◽  
H. Fakhouri ◽  
R. Grilli ◽  
J. Pulpytel ◽  
W. Smith ◽  
...  
Keyword(s):  
Thin Films ◽  
Flow Rate ◽  
Reactive Sputtering ◽  
Gas Pressure ◽  
Tio2 Thin Films ◽  
Doped Tio2 ◽  
N2 Flow Rate

Photocatalytic activity studies of TiO2 thin films prepared by r.f. magnetron reactive sputtering

Vacuum ◽  
2003 ◽  
Vol 72 (1) ◽  
pp. 79-84 ◽  
Author(s):  
S.K. Zheng ◽  
G. Xiang ◽  
T.M. Wang ◽  
F. Pan ◽  
C. Wang ◽  
...  
Keyword(s):  
Thin Films ◽  
Photocatalytic Activity ◽  
Reactive Sputtering ◽  
Tio2 Thin Films

Optical and structural properties of nanocrystalline anatase (TiO2) thin films prepared by non-aqueous sol-gel dip-coating

2011 ◽  
Vol 519 (18) ◽  
pp. 5882-5886 ◽  
Author(s):  
E. Haimi ◽  
H. Lipsonen ◽  
J. Larismaa ◽  
M. Kapulainen ◽  
J. Krzak-Ros ◽  
...  
Keyword(s):  
Thin Films ◽  
Structural Properties ◽  
Sol Gel ◽  
Dip Coating ◽  
Anatase Tio2 ◽  
Tio2 Thin Films ◽  
Nanocrystalline Anatase Tio2

Reactive sputtering deposition of photocatalytic TiO2 thin films on glass substrates

2007 ◽  
Vol 138 (2) ◽  
pp. 139-143 ◽  
Author(s):  
C.J. Tavares ◽  
J. Vieira ◽  
L. Rebouta ◽  
G. Hungerford ◽  
P. Coutinho ◽  
...  
Keyword(s):  
Thin Films ◽  
Reactive Sputtering ◽  
Tio2 Thin Films ◽  
Sputtering Deposition ◽  
Glass Substrates ◽  
Photocatalytic Tio2
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