In situ characterization of thin‐film defect generation using total internal reflection microscopy

1992 ◽  
Vol 10 (4) ◽  
pp. 1472-1478 ◽  
Author(s):  
F. L. Williams ◽  
G. A. Petersen ◽  
C. K. Carmiglia ◽  
B. J. Pond
2006 ◽  
Vol 90 (12) ◽  
pp. 4662-4671 ◽  
Author(s):  
Thomas P. Burghardt ◽  
Jon E. Charlesworth ◽  
Miriam F. Halstead ◽  
James E. Tarara ◽  
Katalin Ajtai

2005 ◽  
Vol 38 (24) ◽  
pp. 10109-10116 ◽  
Author(s):  
Todd M. Roper ◽  
Tai Yeon Lee ◽  
C. Allan Guymon ◽  
Charles E. Hoyle

2016 ◽  
Vol 285 ◽  
pp. 118-121 ◽  
Author(s):  
Masakazu Haruta ◽  
Susumu Shiraki ◽  
Takeo Ohsawa ◽  
Tohru Suzuki ◽  
Akichika Kumatani ◽  
...  

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