Mass spectrometric study of tetraethoxysilane and tetraethoxysilane–oxygen plasmas in a diode type radio‐frequency reactor
1992 ◽
Vol 10
(4)
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pp. 1407-1413
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1970 ◽
Vol 52
(11)
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pp. 5767-5774
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1965 ◽
Vol 30
(7)
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pp. 2464-2467
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2006 ◽
Vol 67
(1-2)
◽
pp. 127-135
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Keyword(s):
1969 ◽
Vol 244
(20)
◽
pp. 5703-5708
Keyword(s):