Time‐resolved measurements of electron and ion concentrations in low‐frequency sulfur hexafluoride discharges

1992 ◽  
Vol 10 (4) ◽  
pp. 1201-1206 ◽  
Author(s):  
Ajit Utagikar ◽  
Brian E. Thompson
Keyword(s):  
Sulfur Hexafluoride ◽  
Low Frequency ◽  
Time Resolved ◽  
Ion Concentrations ◽  
Time Resolved Measurements

Time Resolved Diagnostics of RF Plasmas: a Fluid Model for ion Concentrations in the Sheath

1984 ◽  
Vol 38 ◽  
Author(s):  
Richard A. Gottscho
Keyword(s):  
Impact Ionization ◽  
Fluid Model ◽  
Formation Rate ◽  
Low Frequency ◽  
Quantitative Agreement ◽  
Ion Concentration ◽  
Time Resolved ◽  
Ion Concentrations ◽  
Computational Optimization ◽  
Spectrally Resolved

AbstractA one-dimensional fluid model is presented for time-dependent ion concentrations in chlorine containing discharges. The ion formation rate is determined from experimental plasma-induced emission intensities. The local field is estimated from spectrally resolved laser-induced fluorescence data obtained in similar, BCl3 discharges. Quantitative agreement with experiment is obtained implying that the basic assumptions in the model are valid: (1) ground state ions in the sheath are formed predominantly by electron-impact ionization; (2) Cl2+ ion motion is mobilitylimited by charge exchange collisions with Cl2 neutrals; (3) the degree of Cl2 dissociation is ∼. 65% at a power density of 1.8 W cm−3; (4) the ion concentration near the electrode is spatially uniform throughout most of the rf cycle; and (5) there are two times during a low frequency rf cycle when ions experience a strong extraction force.Semi-empirical models like the one described here should be useful in computational optimization of plasma processes such as etching and deposition, which are in wicre-spread use throughout the microelectronics industry.

Time-resolved measurements of sodium emission in the plume generated by laser ablation of myocardium tissue

2004 ◽  
Author(s):  
Hanriete P. de Souza ◽  
Egberto Munin ◽  
Carlos Eduardo de Vilhena Paiva ◽  
Leandro P. Alves ◽  
Marcela L. Redigolo ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Time Resolved ◽  
Time Resolved Measurements

Time resolved measurements of the energy distribution in unstable plasma II. Measurement in the ionization waves

1971 ◽  
Vol 21 (1) ◽  
pp. 71-76 ◽  
Author(s):  
M. Šícha ◽  
V. Řezáčová ◽  
M. Tichý ◽  
V. Veselý ◽  
M. Drouet ◽  
...  
Keyword(s):  
Energy Distribution ◽  
Time Resolved ◽  
Ionization Waves ◽  
Unstable Plasma ◽  
Time Resolved Measurements
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