Flow and transport modeling of a low pressure plasma etching system

1992 ◽  
Vol 10 (4) ◽  
pp. 1113-1117 ◽  
Author(s):  
Stephen G. Bradley ◽  
Ching‐Hwa Chen ◽  
Thomas J. Jasinski
Keyword(s):  
Plasma Etching ◽  
Low Pressure ◽  
Transport Modeling ◽  
Flow And Transport ◽  
Pressure Plasma ◽  
Low Pressure Plasma ◽  
Etching System

Mechanism of oxygen and argon low pressure plasma etching on polyethylene (UHMWPE)

2019 ◽  
Vol 378 ◽  
pp. 124990 ◽  
Author(s):  
Silvana Marques Miranda Spyrides ◽  
Felipe Sampaio Alencastro ◽  
Erick Fassio Guimaraes ◽  
Fernando Luiz Bastian ◽  
Renata Antoun Simao
Keyword(s):  
Plasma Etching ◽  
Low Pressure ◽  
Pressure Plasma ◽  
Low Pressure Plasma

The dynamics of hot F atoms in low pressure plasma etching reactors

1992 ◽  
Vol 166 (3) ◽  
pp. 317-328 ◽  
Author(s):  
Bernie Shizgal ◽  
Andrew S. Clarke
Keyword(s):  
Plasma Etching ◽  
Low Pressure ◽  
Pressure Plasma ◽  
Low Pressure Plasma

Low pressure plasma etching of silicon carbide

2005 ◽  
Vol 81 (4) ◽  
pp. 793-797 ◽  
Author(s):  
B. Kim ◽  
S. Kim ◽  
B.T. Lee
Keyword(s):  
Silicon Carbide ◽  
Plasma Etching ◽  
Low Pressure ◽  
Pressure Plasma ◽  
Low Pressure Plasma

scholarly journals Low-pressure plasma-etching of bulk polymer materials using gas mixture of CF4 and O2

AIP Advances ◽  
2013 ◽  
Vol 3 (11) ◽  
pp. 112105 ◽  
Author(s):  
Hirofumi Nabesawa ◽  
Takaharu Hiruma ◽  
Takeshi Hitobo ◽  
Suguru Wakabayashi ◽  
Toyohisa Asaji ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Low Pressure ◽  
Polymer Materials ◽  
Gas Mixture ◽  
Bulk Polymer ◽  
Pressure Plasma ◽  
Low Pressure Plasma
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