Energy‐resolved angular distributions of O+ ions at the radio‐frequency‐powered electrode in reactive ion etching

1992 ◽  
Vol 10 (5) ◽  
pp. 3086-3091 ◽  
Author(s):  
Joachim Janes ◽  
Christoph Huth
Keyword(s):  
Radio Frequency ◽  
Reactive Ion Etching ◽  
Angular Distributions ◽  
Ion Etching

Accurate Reactive Ion Etching of Si, Ge and P Doped Ge in an SF6-O2 Radio-Frequency Plasma

2013 ◽  
Vol 50 (9) ◽  
pp. 425-430
Author(s):  
C. Wongwanitwattana ◽  
V. A. Shah ◽  
M. Myronov ◽  
E. H. C. Parker ◽  
T. E. Whall ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Reactive Ion Etching ◽  
Radio Frequency Plasma ◽  
Ion Etching ◽  
Frequency Plasma

Surface characterization of GaAs after the reactive ion etching of GeMoW ohmic contact in radio frequency SF6–O2 plasma

1993 ◽  
Vol 11 (5) ◽  
pp. 2536-2542 ◽  
Author(s):  
A. Campo ◽  
Ch. Cardinaud ◽  
G. Turban ◽  
C. Dubon‐Chevallier ◽  
V. Amarger ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Ohmic Contact ◽  
Surface Characterization ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
O2 Plasma

Magnetron Reactive Ion Etching of GaAs and AIGaAs in CH4/H2/Ar Plasmas.

1996 ◽  
Author(s):  
George F. McLane ◽  
Paul Cooke ◽  
Robert P. Moerkirk
Keyword(s):  
Reactive Ion Etching ◽  
Ion Etching

Modification of the n-Surface Profile of AlGaInN LEDs by Changing the Gas-Mixture Composition During Reactive Ion Etching

2020 ◽  
Vol 54 (6) ◽  
pp. 672-676
Author(s):  
L. K. Markov ◽  
I. P. Smirnova ◽  
M. V. Kukushkin ◽  
A. S. Pavluchenko
Keyword(s):  
Reactive Ion Etching ◽  
Surface Profile ◽  
Mixture Composition ◽  
Gas Mixture ◽  
Ion Etching

Reactive ion etching of III-V compounds using C2H6/H2

1988 ◽  
Vol 24 (13) ◽  
pp. 798 ◽  
Author(s):  
T. Matsui ◽  
H. Sugimoto ◽  
T. Ohishi ◽  
H. Ogata
Keyword(s):  
Reactive Ion Etching ◽  
Ion Etching

GaInAsP/InP mass transport laser monolithically integrated with photodetector using reactive ion etching

1989 ◽  
Vol 25 (15) ◽  
pp. 954 ◽  
Author(s):  
T. Matsui ◽  
H. Sugimoto ◽  
K. Ohtsuka ◽  
Y. Abe ◽  
H. Ogata
Keyword(s):  
Mass Transport ◽  
Reactive Ion Etching ◽  
Ion Etching ◽  
Monolithically Integrated
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