High resolution compositional depth profiling

1991 ◽  
Vol 9 (3) ◽  
pp. 1466-1476 ◽  
Author(s):  
S. Hofmann
Keyword(s):  
High Resolution ◽  
Depth Profiling ◽  
Compositional Depth Profiling

scholarly journals Combination of high-resolution RBS and angle-resolved XPS: accurate depth profiling of chemical states

2008 ◽  
Vol 40 (3-4) ◽  
pp. 423-426 ◽  
Author(s):  
Kenji Kimura ◽  
Kaoru Nakajima ◽  
Ming Zhao ◽  
Hiroshi Nohira ◽  
Takeo Hattori ◽  
...  
Keyword(s):  
High Resolution ◽  
Depth Profiling ◽  
Chemical States

Ion Beam Sputtering for High Resolution Depth Profiling

2009 ◽  
Vol 15 (3) ◽  
pp. 216-219 ◽  
Author(s):  
Hee Jae Kang ◽  
Dae Won Moon ◽  
Hyung-Ik Lee
Keyword(s):  
High Resolution ◽  
Ion Beam ◽  
Depth Profiling ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

The ultra-high resolution depth profiling reference material - Ta2O5 anodically grown on Ta

1984 ◽  
Vol 139 (2-3) ◽  
pp. A136-A137
Author(s):  
M.P. Seah ◽  
H.J. Mathieu ◽  
C.P. Hunt
Keyword(s):  
High Resolution ◽  
Reference Material ◽  
Depth Profiling
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