Electron trapping and chemical composition in radio frequency glow discharge a‐SiN:H
1991 ◽
Vol 9
(6)
◽
pp. 3078-3083
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Keyword(s):
1995 ◽
Vol 50
(4-7)
◽
pp. 617-638
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2017 ◽
Vol 10
(1)
◽
pp. 381-388
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Keyword(s):
2018 ◽
Vol 442
◽
pp. 412-416
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Keyword(s):
2003 ◽
Vol 18
(6)
◽
pp. 646
◽
Keyword(s):
2000 ◽
Vol 15
(9)
◽
pp. 1271-1277
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