Development of a radio-frequency glow discharge source with integrated voltage and current probes
2003 ◽
Vol 18
(6)
◽
pp. 646
◽
Keyword(s):
1995 ◽
Vol 50
(4-7)
◽
pp. 617-638
◽
1994 ◽
Vol 49
(8)
◽
pp. 745-759
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Keyword(s):
1999 ◽
Vol 54
(3-4)
◽
pp. 527-535
◽
2000 ◽
Vol 55
(7)
◽
pp. 833-838
◽
1994 ◽
Vol 9
(9)
◽
pp. 1045
◽
1997 ◽
Vol 52
(11)
◽
pp. 1627-1644
◽
2005 ◽
Vol 383
(3)
◽
pp. 424-433
◽
1997 ◽
Vol 52
(5)
◽
pp. 579-591
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