CF4/O2 plasma etching and surface modification of polyimide films: Time‐dependent surface fluorination and fluorination model

1990 ◽  
Vol 8 (3) ◽  
pp. 2382-2387 ◽  
Author(s):  
P. M. Scott ◽  
L. J. Matienzo ◽  
S. V. Babu
Keyword(s):  
Surface Modification ◽  
Plasma Etching ◽  
Time Dependent ◽  
Polyimide Films ◽  
Surface Fluorination ◽  
O2 Plasma

Study on surface modification of silicon using CHF3/O2 plasma for nano-imprint lithography

2012 ◽  
Vol 30 (3) ◽  
pp. 031601 ◽  
Author(s):  
Youngkeun Kim ◽  
Sungchil Kang ◽  
Yong-Hyun Ham ◽  
Kwang-Ho Kwon ◽  
Dmitriy Alexandrovich Shutov ◽  
...  
Keyword(s):  
Surface Modification ◽  
Imprint Lithography ◽  
O2 Plasma ◽  
Nano Imprint

Surface modification of multi-walled carbon nanotubes by O2 plasma

2007 ◽  
Vol 253 (22) ◽  
pp. 8945-8951 ◽  
Author(s):  
Tao Xu ◽  
Jinghui Yang ◽  
Jiwei Liu ◽  
Qiang Fu
Keyword(s):  
Carbon Nanotubes ◽  
Surface Modification ◽  
Multi Walled Carbon Nanotubes ◽  
Walled Carbon Nanotubes ◽  
O2 Plasma

Photoluminescence characterization of SF6–O2 plasma etching of silicon

1996 ◽  
pp. 100-103
Author(s):  
I.A. Buyanova ◽  
A. Henry ◽  
B. Monemar ◽  
J.L. Lindström ◽  
G.S. Oehrlein
Keyword(s):  
Plasma Etching ◽  
O2 Plasma

scholarly journals Analysis on Self-Organized Formation of Nanofibers on Diamond-Like Carbon Film Surface during RF O2 Plasma Etching

2013 ◽  
Vol 38 (3) ◽  
pp. 447-450 ◽  
Author(s):  
Toru Harigai ◽  
Koyo Iwasa ◽  
Hirofumi Koji ◽  
Noriko Nitta ◽  
Hiroshi Furuta ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Carbon Film ◽  
Film Surface ◽  
Diamond Like Carbon ◽  
Self Organized ◽  
Diamond Like Carbon Film ◽  
O2 Plasma

Surface modification of polyimide films by graft copolymerization

1995 ◽  
Vol 56 (13) ◽  
pp. 1707-1713 ◽  
Author(s):  
F. C. Loh ◽  
C. B. Lau ◽  
K. L. Tan ◽  
E. T. Kang
Keyword(s):  
Surface Modification ◽  
Graft Copolymerization ◽  
Polyimide Films
Sign in / Sign up

Export Citation Format

Share Document