Monte Carlo simulation of thin‐film deposition in a rectangular groove

1989 ◽  
Vol 7 (6) ◽  
pp. 3217-3221 ◽  
Author(s):  
M. J. Cooke ◽  
G. Harris
Keyword(s):  
Thin Film ◽  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Rectangular Groove

Reentrant Growth in Kinetic Thin-Film Deposition on Stepped Surfaces

1995 ◽  
Vol 399 ◽  
Author(s):  
Rong-Fu Xiao
Keyword(s):  
Thin Film ◽  
Monte Carlo Simulation ◽  
Deposition Temperature ◽  
Diffusion Length ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Natural Phenomenon ◽  
Two Dimensional ◽  
Stepped Surfaces ◽  
Thin Film Epitaxy

ABSTRACTWe have studied the reentrant growth in kinetic thin-film deposition on stepped surfaces using a Monte Carlo simulation. The results show that the reentrant oscillation of two dimensional nucleation growth occurs as a result of the variation of surface diffusion length with deposition temperature, and that it is a natural phenomenon in kinetic thin-film epitaxy on a substrate with a permanent step source.

Lattice Monte Carlo models of thin film deposition

2000 ◽  
Vol 365 (2) ◽  
pp. 189-200 ◽  
Author(s):  
George H. Gilmer ◽  
Hanchen Huang ◽  
Tomas Diaz de la Rubia ◽  
Jacques Dalla Torre ◽  
Frieder Baumann
Keyword(s):  
Thin Film ◽  
Monte Carlo ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Lattice Monte Carlo
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