Electrical characterization of radio‐frequency parallel‐plate capacitively coupled discharges

B. Andries; G. Ravel; L. Peccoud

doi:10.1116/1.576177

Electrical characterization of radio‐frequency parallel‐plate capacitively coupled discharges

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.576177 ◽

1989 ◽

Vol 7 (4) ◽

pp. 2774-2783 ◽

Cited By ~ 41

Author(s):

B. Andries ◽

G. Ravel ◽

L. Peccoud

Keyword(s):

Radio Frequency ◽

Parallel Plate ◽

Electrical Characterization ◽

Capacitively Coupled

Download Full-text

Characterization of an Atomospheric-Pressure Parallel-Plate Capacitively Coupled Radio-Frequency Plasma

Applied Spectroscopy ◽

10.1366/0003702914335418 ◽

1991 ◽

Vol 45 (9) ◽

pp. 1468-1477 ◽

Cited By ~ 7

Author(s):

Degui Huang ◽

M. W. Blades

Keyword(s):

Radio Frequency ◽

Parallel Plate ◽

Radio Frequency Plasma ◽

Capacitively Coupled ◽

Frequency Plasma

Download Full-text

Electrical Characterization of Capacitively Coupled Radio Frequency Discharges in Hydrogen

Plasma Processes and Polymers ◽

10.1002/ppap.200732303 ◽

2007 ◽

Vol 4 (S1) ◽

pp. S937-S941 ◽

Cited By ~ 2

Author(s):

Luís S. A. Marques ◽

Jacques Jolly ◽

Luís L. Alves

Keyword(s):

Radio Frequency ◽

Electrical Characterization ◽

Capacitively Coupled ◽

Radio Frequency Discharges

Download Full-text

Atmospheric pressure, radio frequency, parallel plate capacitively coupled plasma—excitation temperatures and analytical figures of merit

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/s0584-8547(97)00080-3 ◽

1997 ◽

Vol 52 (13) ◽

pp. 1983-1993 ◽

Cited By ~ 12

Author(s):

M.M. Rahman ◽

M.W. Blades

Keyword(s):

Radio Frequency ◽

Atmospheric Pressure ◽

Parallel Plate ◽

Capacitively Coupled ◽

Figures Of Merit ◽

Plasma Excitation ◽

Capacitively Coupled Plasma ◽

Analytical Figures Of Merit

Download Full-text

Power coupling and electrical characterization of a radio-frequency micro atmospheric pressure plasma jet

Plasma Sources Science and Technology ◽

10.1088/0963-0252/23/6/062005 ◽

2014 ◽

Vol 23 (6) ◽

pp. 062005 ◽

Cited By ~ 21

Author(s):

D Marinov ◽

N St J Braithwaite

Keyword(s):

Radio Frequency ◽

Atmospheric Pressure ◽

Electrical Characterization ◽

Atmospheric Pressure Plasma ◽

Plasma Jet ◽

Atmospheric Pressure Plasma Jet ◽

Power Coupling ◽

Pressure Plasma

Download Full-text

Electrical Characterization of Metal–Insulator–Metal Capacitors with Atomic-Layer-Deposited HfO 2 Dielectrics for Radio Frequency Integrated Circuit Application

Chinese Physics Letters ◽

10.1088/0256-307x/24/10/063 ◽

2007 ◽

Vol 24 (10) ◽

pp. 2942-2944 ◽

Cited By ~ 10

Author(s):

Huang Yu-Jian ◽

Huang Yue ◽

Ding Shi-Jin ◽

Zhang Wei ◽

Liu Ran

Keyword(s):

Radio Frequency ◽

Integrated Circuit ◽

Electrical Characterization ◽

Atomic Layer ◽

Metal Insulator ◽

Metal Insulator Metal

Download Full-text

Electrical characterization of radio-frequency sputtering gas discharge

Microelectronics Reliability ◽

10.1016/0026-2714(70)90098-3 ◽

1970 ◽

Vol 9 (3) ◽

pp. 230

Keyword(s):

Radio Frequency ◽

Electrical Characterization ◽

Gas Discharge ◽

Radio Frequency Sputtering

Download Full-text

Electrical characterization of Au/Pd/n-GaN/Pd/Au device structure in the radio frequency range by simulation study

Synthetic Metals ◽

10.1016/j.synthmet.2011.05.018 ◽

2011 ◽

Vol 161 (13-14) ◽

pp. 1434-1440 ◽

Cited By ~ 4

Author(s):

A. Sertap Kavasoglu ◽

Nese Kavasoglu ◽

Gorkem Oylumluoglu

Keyword(s):

Radio Frequency ◽

Simulation Study ◽

Electrical Characterization ◽

Frequency Range ◽

Device Structure

Download Full-text

Electrical characterization of radio‐frequency discharges in the Gaseous Electronics Conference Reference Cell

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.577783 ◽

1992 ◽

Vol 10 (6) ◽

pp. 3550-3562 ◽

Cited By ~ 78

Author(s):

Mark A. Sobolewski

Keyword(s):

Radio Frequency ◽

Electrical Characterization ◽

Reference Cell ◽

Radio Frequency Discharges ◽

Gaseous Electronics Conference

Download Full-text

Electrical characterization of γ-Al2O3 thin film parallel plate capacitive sensor for trace moisture detection

10.1117/12.926779 ◽

2012 ◽

Author(s):

Lokesh Kumar ◽

Shailesh Kumar ◽

S. A. Khan ◽

Tariqul Islam

Keyword(s):

Thin Film ◽

Parallel Plate ◽

Electrical Characterization ◽

Capacitive Sensor ◽

Trace Moisture ◽

Moisture Detection ◽

Al2o3 Thin Film

Download Full-text

Electrical characterization of radio frequency discharges

Plasma Sources Science and Technology ◽

10.1088/0963-0252/14/2/s08 ◽

2005 ◽

Vol 14 (2) ◽

pp. S60-S67 ◽

Cited By ~ 13

Author(s):

C M O Mahony ◽

P D Maguire ◽

W G Graham

Keyword(s):

Radio Frequency ◽

Electrical Characterization ◽

Radio Frequency Discharges

Download Full-text