Drift in film thickness uniformity arising from sputtering target recrystallization

1989 ◽  
Vol 7 (3) ◽  
pp. 2355-2358 ◽  
Author(s):  
G. R. Haupt ◽  
C. E. Wickersham
Keyword(s):  
Film Thickness ◽  
Thickness Uniformity

scholarly journals Effect of high-frequency switching electrolysis on film thickness uniformity of anodic oxide film formed on AC8A Aluminum alloy

2010 ◽  
Vol 60 (11) ◽  
pp. 602-607 ◽  
Author(s):  
Tomoharu Yamamoto ◽  
Hiroomi Tanaka ◽  
Masahiro Fujita ◽  
Hidetaka Asoh ◽  
Sachiko Ono
Keyword(s):  
Aluminum Alloy ◽  
Oxide Film ◽  
Film Thickness ◽  
High Frequency ◽  
Anodic Oxide ◽  
Anodic Oxide Film ◽  
Thickness Uniformity

Study on Film Thickness Uniformity of Magnetron Sputtering System Based on Twin Target

2021 ◽  
Vol 41 (7) ◽  
pp. 0731001
Author(s):  
魏博洋 Wei Boyang ◽  
刘冬梅 Liu Dongmei ◽  
付秀华 Fu Xiuhua ◽  
张静 Zhang Jing ◽  
汪洋 Wang Yang ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Film Thickness ◽  
Thickness Uniformity ◽  
Sputtering System

Large scale thin film thickness uniformity extraction based on dynamic spectroscopic ellipsometry

2021 ◽  
Author(s):  
Daesuk Kim ◽  
Gukhyeon Hwang ◽  
Gukhyeon Hwang ◽  
Sukhyun Choi ◽  
Vamara Dembele ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Thickness ◽  
Spectroscopic Ellipsometry ◽  
Large Scale ◽  
Thin Film Thickness ◽  
Thickness Uniformity
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