Mechanical properties (hardness and adhesion) of a‐C:H thin films produced by dual ion beam sputtering

1989 ◽  
Vol 7 (3) ◽  
pp. 2303-2306 ◽  
Author(s):  
S. Scaglione ◽  
G. Emiliani
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering

Epitaxial growth of MgO thin films on silicon by dual ion beam sputtering

1993 ◽  
Vol 223 (1) ◽  
pp. 11-13 ◽  
Author(s):  
Yijie Li ◽  
Guangcheng Xiong ◽  
Guijun Lian ◽  
Jie Li ◽  
Zizhao Gan
Keyword(s):  
Thin Films ◽  
Epitaxial Growth ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering

Hard BCxNy thin films grown by dual ion beam sputtering

2006 ◽  
Vol 515 (1) ◽  
pp. 207-211 ◽  
Author(s):  
C. Morant ◽  
P. Prieto ◽  
J. Bareño ◽  
J.M. Sanz ◽  
E. Elizalde
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering

Ion Beam Processing of Optical Materials

1988 ◽  
Vol 129 ◽  
Author(s):  
F. L. Williams ◽  
L. L. Boyer ◽  
W. Reicher ◽  
J. J. McNally ◽  
G. A. Al-Jumaily ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Packing Density ◽  
Optical Materials ◽  
Ion Beam ◽  
Film Material ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Optical And Mechanical Properties ◽  
Deposition Techniques

ABSTRACTWe have deposited thin films of optical materials using ion beam sputtering and ion assisted deposition techniques. It is possible to obtain good quality film material deposited on substrates at temperatures lower than normally required. Ion assisted deposition influences film stoichiometry and packing density, which in turn determine optical and mechanical properties of the film material. We discuss two general indicators which appear helpful in predicting the degree to which these occur.

Structural and Mechanical Properties of Stainless Steel Thin Films Elaborated by Thermal Evaporation and Ion Beam Sputtering

2003 ◽  
Vol 426-432 ◽  
pp. 3451-3456 ◽  
Author(s):  
Philippe Goudeau ◽  
N. Merakeb ◽  
J.P. Eymery ◽  
D. Faurie ◽  
B. Boubeker ◽  
...  
Keyword(s):  
Thin Films ◽  
Mechanical Properties ◽  
Stainless Steel ◽  
Thermal Evaporation ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering

Processing of La1.8Sr0.2CuO4and YBa2Cu3O7superconducting thin films by dual‐ion‐beam sputtering

1988 ◽  
Vol 63 (6) ◽  
pp. 2046-2053 ◽  
Author(s):  
P. Madakson ◽  
J. J. Cuomo ◽  
D. S. Yee ◽  
R. A. Roy ◽  
G. Scilla
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Dual Ion Beam Sputtering
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