A miniature deflected‐ion‐beam ionization gauge with the channel electron multiplier

1987 ◽  
Vol 5 (4) ◽  
pp. 2447-2449 ◽  
Author(s):  
Wangkui Li ◽  
Zhou Zhang
Author(s):  
Wm. H. Escovitz ◽  
T. R. Fox ◽  
R. Levi-Setti

Charge exchange, the neutralization of ions by electron capture as the ions traverse matter, is a well-known phenomenon of atomic physics which is relevant to ion microscopy. In conventional transmission ion microscopes, the neutral component of the beam after it emerges from the specimen cannot be focused. The scanning transmission ion microscope (STIM) enables the detection of this signal to make images. Experiments with a low-resolution 55 kV STIM indicate that the charge-exchange signal provides a new contrast mechanism to detect extremely small amounts of matter. In an early version of charge-exchange detection (fig. 1), a permanent magnet installed between the specimen and the detector (a channel electron multiplier) sweeps the charged beam component away from the detector and allows only the neutrals to reach it. When the magnet is removed, both charged and neutral particles reach the detector.


1968 ◽  
Vol 15 (1) ◽  
pp. 498-502 ◽  
Author(s):  
W. C. Kaiser ◽  
W. W. Managan ◽  
T. A. Mayer

1983 ◽  
Vol 61 (4) ◽  
pp. 535-542 ◽  
Author(s):  
N. Klaus ◽  
J. D. Brown

A low cost test device for secondary ion mass spectrometry (SIMS) components is described. It consists of a turbomolecular pumped vessel containing an insulated sample stage on an x−y manipulator, extraction optics, quadrupole mass filter, and channel electron multiplier. The construction and characteristics of a cylindrical and a spherical saddlefield ion source are described. The output of the cylindrical source is 10−4 A cm−2 whereas that of the spherical source is in the order of 10−3 A cm−2 at voltages up to 9 kV and at a beam divergence of 4°.


2015 ◽  
Vol 62 (5) ◽  
pp. 2283-2293 ◽  
Author(s):  
Herbert O. Funsten ◽  
Ronnie W. Harper ◽  
Eric E. Dors ◽  
Paul A. Janzen ◽  
Brian A. Larsen ◽  
...  

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