Optical characterization of SiO1.1 silicon oxide layers on InSb

1987 ◽  
Vol 5 (4) ◽  
pp. 1115-1119
Author(s):  
G. Remond ◽  
R. Caye ◽  
P. H. Holloway ◽  
P. Ruzakowski
2011 ◽  
Vol 178-179 ◽  
pp. 385-391
Author(s):  
David Lysáček ◽  
Jan Šik ◽  
Petr Bábor

We report on a new method of external gettering in silicon substrate for semiconductor applications. The proposed method is based on the deposition of a multilayer system formed by introducing a number of thin buried silicon oxide layers into the thick polycrystalline silicon layer deposited on the wafer backside. Oxide films of a few nanometer thicknesses significantly retard both the grain growth and subsequent loss of the gettering capability of the polycrystalline silicon layer during high temperature annealing. The mechanisms of the grain growth and the influence of the embedded oxide layers on the gettering function in the multilayer system are discussed. We used scanning electron microscopy and transmission electron microscopy for the characterization of the multilayer system, and intentional contamination for demonstration of the gettering properties.


2008 ◽  
Vol 8 (8) ◽  
pp. 4202-4206 ◽  
Author(s):  
Sharon M. King ◽  
Shweta Chaure ◽  
Satheesh Krishnamurthy ◽  
Werner J. Blau ◽  
Alan Colli ◽  
...  

The optical properties of four different silicon nanowire structures were investigated. Two of the samples consisted of spheres of nanocrystalline silicon en-capsulated by silicon oxide nanowires, with other two consisting of crystalline silicon nanowires coated by silicon oxide shells. The nanostructures produced by oxide assisted growth consisted of spheres of crystalline silicon encapsulated by silicon oxide shells. The absorption and photoluminescence of the different structures of the sample are investigated. The emitting species responsible for photoluminescence across the visible spectrum are discussed.


2018 ◽  
Vol 50 (11) ◽  
pp. 1230-1233 ◽  
Author(s):  
Ivan Ohlídal ◽  
Jiří Vohánka ◽  
Jan Mistrík ◽  
Martin Čermák ◽  
Daniel Franta

2020 ◽  
Vol 12 (4) ◽  
pp. 04022-1-04022-4
Author(s):  
Piyush Patel ◽  
◽  
S. M. Vyas ◽  
Vimal Patel ◽  
Himanshu Pavagadhi ◽  
...  

2014 ◽  
Vol 01 (999) ◽  
pp. 1-1
Author(s):  
Wei Zhu ◽  
Qihui Shen ◽  
Xinjian Bao ◽  
Xiao Bai ◽  
Tingting Li ◽  
...  

2021 ◽  
Vol 258 ◽  
pp. 123994
Author(s):  
Luciana M. Schabbach ◽  
Bruno C. dos Santos ◽  
Letícia S. De Bortoli ◽  
Márcio Celso Fredel ◽  
Bruno Henriques

2021 ◽  
Vol 1762 (1) ◽  
pp. 012041
Author(s):  
K Buchkov ◽  
A Galluzzi ◽  
B Blagoev ◽  
A Paskaleva ◽  
P Terziyska ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document